公开(公告)号：US20160209275A1

公开(公告)日：2016-07-21

申请号：US14995861

申请日：2016-01-14

Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

Inventor： KIN P. CHEUNG ,  JASON T. RYAN ,  JASON CAMPBELL

IPC: G01J9/02

CPC classification number: H01Q1/526 ,  G01N22/00 ,  H01Q1/521

Abstract: A phase shift detector includes: an interferometer; and a microwave probe in electrical communication with the interferometer, the microwave probe including: a primary shield electrode; and a transmission electrode disposed proximate to the primary shield electrode, the transmission electrode and the primary shield electrode being exposed and arranged to produce an electric field, wherein the transmission electrode is isolated electrically from the primary shield electrode. A process for acquiring phase shift data includes: receiving a microwave radiation by a power splitter; producing a reference microwave radiation and a sample microwave radiation; communicating the reference microwave radiation to a reference arm; communicating the sample radiation to a sample arm; communicating the sample radiation from the sample arm to a microwave probe; subjecting a sample to the sample microwave radiation; producing a probe microwave radiation in response to subjecting the sample to the sample microwave radiation; communicating the probe microwave radiation to a power combiner; receiving the probe microwave radiation and the reference microwave radiation from the reference arm; and producing an interferometer signal in response to receiving the probe microwave radiation and the reference microwave radiation to acquire phase shift data.

Abstract translation: 一种相移检测器，包括：干涉仪; 以及与所述干涉仪电通信的微波探头，所述微波探头包括：主屏蔽电极; 以及布置在所述主屏蔽电极附近的透射电极，所述透射电极和所述主屏蔽电极被曝光和布置以产生电场，其中所述透射电极与所述主屏蔽电极电隔离。 一种用于获取相移数据的过程包括：通过功率分配器接收微波辐射; 产生参考微波辐射和样品微波辐射; 将参考微波辐射传送到参考臂; 将样品辐射传递到样品臂; 将样品辐射从样品臂传送到微波探针; 使样品经受样品微波辐射; 响应于使样品经受样品微波辐射而产生探针微波辐射; 将探测微波辐射传送到功率组合器; 从参考臂接收探头微波辐射和参考微波辐射; 以及响应于接收到所述探针微波辐射和所述参考微波辐射而产生干涉仪信号以获取相移数据。