公开(公告)号：US11029421B2

公开(公告)日：2021-06-08

申请号：US16557268

申请日：2019-08-30

Applicant: NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER ,  ACADEMIA SINICA

Inventor： Bing-Ming Cheng ,  Hsiao-Chi Lu ,  Jen-Iu Lo ,  Huan-Cheng Chang

IPC: G01J1/58 ,  G01T1/202 ,  G01J1/42 ,  H01L31/0232 ,  H01L31/09

Abstract: The present disclosure provides a fluorescent nitrogen-vacancy diamond (FNVD) having a plurality of nitrogen-vacancy centers with a concentration about 1 ppm to 10,000 ppm. The FNVD as built-in fluorophores exhibit a nearly constant emission profile over 540 nm to 850 nm upon excitation by vacuum ultraviolet (VUV), extreme ultraviolet (EUV) and X-rays for the energy larger than 6.2 eV. Applying the FNVD sensor can measure VUV/EUV/X-rays as a sensing sheet, manufacturing method and uses thereof, sensor and lithography apparatus. The superb photostability and broad applicability of FNVDs offer a promising solution for the long-standing problem of lacking robust and reliable detectors for VUV, EUV, and X-rays.