公开(公告)号：US20170227461A1

公开(公告)日：2017-08-10

申请号：US15328871

申请日：2014-08-01

Applicant: NEWPORT CORPORATION

Inventor： Anderson CHEN ,  John PARK

IPC: G01N21/55 ,  G01N21/59

CPC classification number: G01N21/55 ,  G01J3/00 ,  G01J3/02 ,  G01J3/0264 ,  G01J3/10 ,  G01J3/433 ,  G01J2003/104 ,  G01J2003/283 ,  G01J2003/2836 ,  G01J2003/4334 ,  G01N21/474 ,  G01N21/59 ,  G01N21/64 ,  G01N2021/556 ,  G01N2201/0691 ,  H02S50/10

Abstract: Systems for measuring optical properties of a specimen are disclosed. The systems are configured to sample signals related to the measurement of the properties of a specimen, and perform software-based coherent detection of the signals to generate resulting measurements are based on the signals acquired at substantially the same time instance. This facilitates the displaying or generating of the desired measurements in real time. In one configuration, the system is configured to direct a modulated light signal at a selected wavelength incident upon a specimen. In another configuration, the system is configured to direct a combined light signal, derived from a plurality of light signals at different wavelengths and modulated with different frequencies, incident upon a specimen. In yet another configuration, the system is configured to direct a plurality of light signals modulated with different frequencies incident upon different regions of a specimen.