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公开(公告)号:US20020040598A1
公开(公告)日:2002-04-11
申请号:US09971711
申请日:2001-10-09
发明人: Satoshi Sugaya , Tetsuo Yamada , Noboru Ishida
IPC分类号: G01N001/00 , G01N019/00 , H01C007/00
CPC分类号: G01N27/121
摘要: A humidity sensor including an insulating substrate, and a lower electrode formed from a noble metal, a moisture sensitive layer formed of a porous body predominantly containing alumina and containing predetermined amounts of TiO2 and SnO2 and an upper electrode formed of a noble metal porous body successively formed on the insulating substrate. The upper electrode is connected to the moisture sensitive layer and a portion of the insulating substrate. Preferably, the lower electrode is formed of a porous body. More preferably, the lower and upper electrodes are formed from Pt. Furthermore, preferably, a heater and a temperature measurement resistor are provided in the insulating substrate and are located directly below the moisture sensitive layer.
摘要翻译: 一种湿度传感器,包括绝缘基板和由贵金属形成的下电极,由主要含有氧化铝并含有预定量的TiO 2和SnO 2的多孔体形成的湿敏层和由贵金属多孔体形成的上电极 形成在绝缘基板上。 上电极连接到湿敏层和绝缘基板的一部分。 优选地,下电极由多孔体形成。 更优选地,下电极和上电极由Pt形成。 此外,优选地,在绝缘基板中设置加热器和温度测量电阻器,并且位于湿敏层的正下方。
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公开(公告)号:US20020190840A1
公开(公告)日:2002-12-19
申请号:US10157134
申请日:2002-05-30
发明人: Hiroki Fujita , Tetsuo Yamada , Satoshi Sugaya , Kenji Kato , Noboru Ishida , Takafumi Oshima
IPC分类号: G01N001/00
CPC分类号: G01N27/121
摘要: A humidity sensor comprising an insulating substrate, a detection electrodes and a moisture-sensitive layer, wherein the moisture-sensitive layer is a porous layer and has a thickness not greater than 200 nullm.
摘要翻译: 一种湿度传感器,包括绝缘基板,检测电极和湿度敏感层,其中所述湿度敏感层是多孔层,并且具有不大于200μm的厚度。
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