Humidity sensor
    1.
    发明申请
    Humidity sensor 失效
    湿度传感器

    公开(公告)号:US20020040598A1

    公开(公告)日:2002-04-11

    申请号:US09971711

    申请日:2001-10-09

    CPC分类号: G01N27/121

    摘要: A humidity sensor including an insulating substrate, and a lower electrode formed from a noble metal, a moisture sensitive layer formed of a porous body predominantly containing alumina and containing predetermined amounts of TiO2 and SnO2 and an upper electrode formed of a noble metal porous body successively formed on the insulating substrate. The upper electrode is connected to the moisture sensitive layer and a portion of the insulating substrate. Preferably, the lower electrode is formed of a porous body. More preferably, the lower and upper electrodes are formed from Pt. Furthermore, preferably, a heater and a temperature measurement resistor are provided in the insulating substrate and are located directly below the moisture sensitive layer.

    摘要翻译: 一种湿度传感器,包括绝缘基板和由贵金属形成的下电极,由主要含有氧化铝并含有预定量的TiO 2和SnO 2的多孔体形成的湿敏层和由贵金属多孔体形成的上电极 形成在绝缘基板上。 上电极连接到湿敏层和绝缘基板的一部分。 优选地,下电极由多孔体形成。 更优选地,下电极和上电极由Pt形成。 此外,优选地,在绝缘基板中设置加热器和温度测量电阻器,并且位于湿敏层的正下方。

    Humidity sensor
    2.
    发明申请
    Humidity sensor 失效
    湿度传感器

    公开(公告)号:US20020190840A1

    公开(公告)日:2002-12-19

    申请号:US10157134

    申请日:2002-05-30

    IPC分类号: G01N001/00

    CPC分类号: G01N27/121

    摘要: A humidity sensor comprising an insulating substrate, a detection electrodes and a moisture-sensitive layer, wherein the moisture-sensitive layer is a porous layer and has a thickness not greater than 200 nullm.

    摘要翻译: 一种湿度传感器,包括绝缘基板,检测电极和湿度敏感层,其中所述湿度敏感层是多孔层,并且具有不大于200μm的厚度。