LOAD PORT ADAPTER
    1.
    发明公开
    LOAD PORT ADAPTER 审中-公开

    公开(公告)号:US20230163008A1

    公开(公告)日:2023-05-25

    申请号:US17912058

    申请日:2021-03-11

    CPC classification number: H01L21/67772 H01L21/6732 H01L21/6734 H01L21/68

    Abstract: A load port adapter is a load port adapter fixable on a mounting table of a load port. The load port adapter includes a holder capable of holding a cassette capable of accommodating a plurality of circuit boards. The holder is fixable on the mounting table of the load port. The holder includes a position adjustment mechanism configured to position the cassette at a reference position. In the cassette clamped on the load port adapter, the reference position is a reference position on a load port adapter side when the circuit board is taken out from the cassette.

    INSPECTION DEVICE
    2.
    发明申请

    公开(公告)号:US20230024921A1

    公开(公告)日:2023-01-26

    申请号:US17785920

    申请日:2020-12-01

    Inventor: Takashi ISA

    Abstract: An upper mechanism including a table provided with a placement surface of an inspection target, a lower mechanism configured to rotatably support the upper mechanism, and a lifting operation unit configured to be supported by the upper mechanism so as to be movable up and down are provided. The lower mechanism includes a rotation drive unit configured to rotate the upper mechanism, and a push-up force output unit configured to lift and lower the lifting operation unit. A transmission member with which a tip of the push-up force output unit can contact or separate is provided at a lower end of the lifting operation unit.

    CIRCUIT BOARD INSPECTING APPARATUS

    公开(公告)号:US20230115469A1

    公开(公告)日:2023-04-13

    申请号:US17913840

    申请日:2021-03-25

    Abstract: A circuit board inspecting apparatus includes a rotary table having a mount surface, a rotary table support section, a suction device, a suction path having a first end connected to the suction device and a second end located at the mount surface, an adsorption mechanism that adsorbs the board onto the mount surface so that the suction device sucks in gas in the suction path, a flow rate detection section that detects a flow rate of gas flowing through a portion of the suction path, the portion located inside the rotary table support section, a flow rate determination section that determines whether the flow rate of the gas detected by the flow rate detection section is equal to or more than a predetermined value, a contactless detection section that detects a placement state of the board on the mount surface in a contactless manner, and an inspection section.

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