公开(公告)号：US11092170B2

公开(公告)日：2021-08-17

申请号：US16485406

申请日：2018-02-12

Applicant: NIKON CORPORATION

Inventor： Alex Ka Tim Poon ,  Yeong-Jun Choi ,  Pai-Hsueh Yang ,  Sandy Lee ,  Gaurav Keswani ,  Rocky Mai

IPC: F15B9/08 ,  F15B9/03 ,  F15B11/00 ,  F15B11/028 ,  F15B11/042 ,  F15B13/04

Abstract: A stage assembly (10) includes a stage (14), and a fluid actuator assembly (24) that moves the stage (14). The fluid actuator assembly (24) includes a piston housing (32) that defines a piston chamber (34); (ii) a piston (36) that separates the piston chamber (34) into a first chamber (34A) and a second chamber (34B); (iii) a supply valve (38C) that controls the flow of the working fluid (40) into the first chamber (34A); and (iv) an exhaust valve (38D) that controls the flow of the working fluid (40) out of the first chamber (34A). The supply valve (38C) has a supply orifice (250G) having a supply orifice area, and the exhaust valve (38D) has an exhaust orifice (352G) having an exhaust orifice area. Moreover, the supply orifice area is different from the exhaust orifice area. Further multiple valves of different sizes can be used in combination for the supply and exhaust for each chamber (34A), (34B).