公开(公告)号：US11092170B2

公开(公告)日：2021-08-17

申请号：US16485406

申请日：2018-02-12

Applicant: NIKON CORPORATION

Inventor： Alex Ka Tim Poon ,  Yeong-Jun Choi ,  Pai-Hsueh Yang ,  Sandy Lee ,  Gaurav Keswani ,  Rocky Mai

IPC: F15B9/08 ,  F15B9/03 ,  F15B11/00 ,  F15B11/028 ,  F15B11/042 ,  F15B13/04

Abstract: A stage assembly (10) includes a stage (14), and a fluid actuator assembly (24) that moves the stage (14). The fluid actuator assembly (24) includes a piston housing (32) that defines a piston chamber (34); (ii) a piston (36) that separates the piston chamber (34) into a first chamber (34A) and a second chamber (34B); (iii) a supply valve (38C) that controls the flow of the working fluid (40) into the first chamber (34A); and (iv) an exhaust valve (38D) that controls the flow of the working fluid (40) out of the first chamber (34A). The supply valve (38C) has a supply orifice (250G) having a supply orifice area, and the exhaust valve (38D) has an exhaust orifice (352G) having an exhaust orifice area. Moreover, the supply orifice area is different from the exhaust orifice area. Further multiple valves of different sizes can be used in combination for the supply and exhaust for each chamber (34A), (34B).

公开(公告)号：US20220305733A1

公开(公告)日：2022-09-29

申请号：US17701098

申请日：2022-03-22

Applicant: Nikon Corporation

Inventor： Victor Itliong Solidum ,  Kristopher Daniel Sanford ,  Alton Hugh Phillips ,  Lexian Guo ,  Patrick Shih Chang ,  Johnathan Agustin Marquez ,  Yeong-Jun Choi

IPC: B29C64/329 ,  B29C64/153 ,  B29C64/245 ,  B29C64/255 ,  B29C64/268 ,  B29C64/386 ,  B33Y30/00 ,  B33Y40/00 ,  B33Y50/00 ,  G01F23/263 ,  G01F23/20 ,  G01F23/292

Abstract: A level sensor assembly (552) for estimating a level of a dielectric powder (412) in a container assembly (544) includes a first electrode member (554) that is coupled to the container assembly (544); a second electrode member (556) that is coupled to the container assembly (544): and a control system (424). The second electrode member (556) is spaced apart from the first electrode member (554) and configured so that powder (512) in the container assembly (544) is positioned at least partly between the electrode members (554) (556). The control system (424) utilizes a capacitance between the electrode members (554) (556) to estimate the level of the powder (512) in the container assembly (544).

公开(公告)号：US20130069449A1

公开(公告)日：2013-03-21

申请号：US13621669

申请日：2012-09-17

Applicant: Nikon Corporation

Inventor： Michel Pharand ,  Michael B. Binnard ,  Shigeru Morimoto ,  Chetan Mahadeswaraswamy ,  Rick K. Ingram ,  Christopher Edward Hatch ,  Alex Ka Tim Poon ,  Gaurav Keswani ,  Derek Coon ,  Yeong-Jun Choi

IPC: H02K15/06 ,  H02K41/02

CPC classification number: H02K41/031 ,  H02K3/24 ,  H02K9/19 ,  H02K9/22 ,  H02K2201/18

Abstract: Coil arrays are disclosed for a planar or linear motor. An exemplary coil array includes multiple coil modules. Each coil module includes at least one coil set, respective electrical circuitry to and from the coil set, at least one respective hydraulic cooling device for the coil set, and respective hydraulic conduitry to and from the cooling device. The coil modules are interchangeably mountable relative to each other in the array such that mounting the coil module to the array produces accompanying hydraulic and electrical connections between the array and coil module, and removing the coil module from the array severs the connections.

Abstract translation: 公开了用于平面或线性电动机的线圈阵列。 示例性线圈阵列包括多个线圈模块。 每个线圈组件包括至少一个线圈组，到线圈组和来自线圈组的相应电路，用于线圈组的至少一个相应的液压冷却装置，以及往返于冷却装置的相应的液压导管。 线圈模块相对于阵列中的彼此可互换地安装，使得将线圈模块安装到阵列上产生阵列和线圈模块之间的伴随的液压和电气连接，并且从阵列中去除线圈模块以切断连接。