Sliding member and coating film
    1.
    发明授权

    公开(公告)号:US11293548B2

    公开(公告)日:2022-04-05

    申请号:US16624781

    申请日:2018-06-15

    摘要: A sliding member (10) including a coating film (1) composed of a hard carbon layer on a sliding surface (16) of a base material (11). The coating film has, when a cross section thereof is observed by a bright-field TEM image, a thickness within a range of 1 μm to 50 μm, and is configured by repeating units including black hard carbon layers (B), relatively shown in black, and white hard carbon layers (W), relatively shown in white, and laminated in a thickness direction, and comprise an inclined region, provided on a base material side, where thicknesses of white hard carbon layers (W) of the repeating units gradually increase in a thickness direction, and a homogeneous region\, provided on a surface side of the sliding member, where thicknesses of the white hard carbon layers (W) of the repeating units are the same or substantially the same in the thickness direction.

    Coating film, method for manufacturing same, and PVD apparatus

    公开(公告)号:US11247903B2

    公开(公告)日:2022-02-15

    申请号:US16087088

    申请日:2017-03-02

    申请人: NIPPON ITF, INC.

    摘要: Provided is a physical vapor deposition (PVD) method in which a thick, hard carbon film having excellent durability can be formed, and chipping resistance and wear resistance can bot be achieved while improving the low friction properties and peeling resistance of the formed hard carbon film. Provided is a coating film having a total film thickness of greater than 1 μm and less than or equal to 50 μm, wherein, when observed using a bright field TEM image, the cross section of the coating film is revealed to consist of relatively white hard carbon layers and relatively black hard carbon layers alternately stacked in the thickness direction, and the white hard carbon layers have a region having a columns-shape, which has grown in the thickness direction.