公开(公告)号：US20170212418A1

公开(公告)日：2017-07-27

申请号：US15313918

申请日：2015-05-11

Applicant: NIPPON LIGHT METAL COMPANY, LTD.

Inventor： Kazuo KOHMURA ,  Yosuke ONO ,  Daiki TANEICHI ,  Yasuyuki SATO ,  Toshiaki HIROTA ,  Kiyokazu KOGA

IPC: G03F1/64

CPC classification number: G03F1/64 ,  G03F1/62 ,  G03F1/66 ,  G03F7/70691 ,  G03F7/70866 ,  G03F7/70916 ,  G03F7/70975 ,  G03F7/70983

Abstract: Provided is a support frame for pellicles which includes an aluminum alloy-made frame body with a pellicle film bonded to a front surface of the frame body, and with a glass substrate bonded to a back surface of the frame body. A front-side recessed groove extending in a circumferential direction of the frame body is formed on the front surface of the frame body, and a front-side suction hole extending from an outer peripheral surface of the frame body to an inner surface of the front-side recessed groove is formed on the frame body.