公开(公告)号：US20190235377A1

公开(公告)日：2019-08-01

申请号：US16316501

申请日：2017-06-30

Applicant: NIPPON LIGHT METAL COMPANY, LTD. ,  Mitsui Chemicals, Inc.

Inventor： Yoshihiro TAGUCHI ,  Kazuo KOHMURA ,  Daiki TANEICHI

IPC: G03F1/64 ,  G03F7/20 ,  C22C21/00 ,  C22F1/04 ,  C23F17/00 ,  C25D11/10 ,  C25D11/14 ,  C25D11/18

CPC classification number: G03F1/64 ,  C22C21/00 ,  C22F1/00 ,  C22F1/04 ,  C23F17/00 ,  C25D11/04 ,  C25D11/10 ,  C25D11/14 ,  C25D11/18 ,  G03F1/84 ,  G03F7/70983

Abstract: The present invention provides; a pellicle frame which can effectively inhibit distortion of the photo mask (8) caused by mounting the pellicle (1), and which does not have a complex shape, and a pellicle which uses said pellicle frame are provided, and a manufacturing method of a blackened pellicle frame is also provided which can reduce the defect of the surface flickering under concentrated light and which facilitates inspection of the foreign matter adhesion prior to use. The present invention relates to a pellicle frame with an anodized film on a surface of an aluminum alloy frame, characterized in that: the aluminum alloy frame comprises an aluminum alloy which contains Ca: 5.0 to 10.0% by mass with the remainder aluminum and unavoidable impurities are contained, and has an area (volume) ratio of an Al4Ca phase, which is a dispersed phase, is greater than or equal to 25%, and a crystal structure of a part of the Al4Ca phase is monoclinic; wherein the Al4Ca phase dispersed in the anodized film is anodized, and the anodized film is stained with a black dye.

公开(公告)号：US20170212418A1

公开(公告)日：2017-07-27

申请号：US15313918

申请日：2015-05-11

Applicant: NIPPON LIGHT METAL COMPANY, LTD.

Inventor： Kazuo KOHMURA ,  Yosuke ONO ,  Daiki TANEICHI ,  Yasuyuki SATO ,  Toshiaki HIROTA ,  Kiyokazu KOGA

IPC: G03F1/64

CPC classification number: G03F1/64 ,  G03F1/62 ,  G03F1/66 ,  G03F7/70691 ,  G03F7/70866 ,  G03F7/70916 ,  G03F7/70975 ,  G03F7/70983

Abstract: Provided is a support frame for pellicles which includes an aluminum alloy-made frame body with a pellicle film bonded to a front surface of the frame body, and with a glass substrate bonded to a back surface of the frame body. A front-side recessed groove extending in a circumferential direction of the frame body is formed on the front surface of the frame body, and a front-side suction hole extending from an outer peripheral surface of the frame body to an inner surface of the front-side recessed groove is formed on the frame body.