公开(公告)号：US20180292203A1

公开(公告)日：2018-10-11

申请号：US15767081

申请日：2017-01-19

Applicant: NIPPON STEEL & SUMITOMO METAL CORPORATION

Inventor： Toshio AKAGI ,  Yusuke KONNO ,  Atsuhiro HIBI ,  Nobuhiro FURUYA ,  Takayuki SONODA ,  Akihito NAKAZAKI

IPC: G01B11/30 ,  G01B11/24

Abstract: [Object] To provide a shape measurement apparatus that is capable of detecting minute roughness irregularity at high speed across the entire width on the entire surface of a measurement object.[Solution] Provided is a shape measurement apparatus including: a light source configured to irradiate a surface of a moving strip-shaped body with linear light diagonally from an upstream side in a movement direction of the strip-shaped body; a screen configured such that reflected light of the linear light on the surface of the strip-shaped body is projected on the screen; an imaging unit configured to image the reflected light of the linear light projected on the screen; and an arithmetic processing unit configured to acquire surface roughness distribution of the strip-shaped body on the basis of width distribution of a light strip of the reflected light of the linear light projected on the screen. The angle of incidence of the light source with respect to the strip-shaped body is set in accordance with target surface roughness of the surface of the strip-shaped body.