PERMITTIVITY MEASURING DEVICE AND THICKNESS MEASURING DEVICE

    公开(公告)号:US20230236005A1

    公开(公告)日:2023-07-27

    申请号:US17918950

    申请日:2020-04-22

    CPC classification number: G01B11/06 G01N21/3581 G01N21/3563

    Abstract: An object permittivity measurement apparatus according to the present disclosure includes: a light wave distance measurement device configured to measure reciprocating time t of a light wave with which an object is irradiated and that is reflected and returned from the object, and calculate a distance L to the object using the following equation (1),


    L=ct/2   (1)

    c: light speed;

    an electromagnetic wave phase measurement device configured to measure a rotated phase φ of an electromagnetic wave having a frequency f with which the object is irradiated and that is reflected and returned from the object; and

    a permittivity calculation circuit configured to calculate permittivity ε of a foreign material on an object surface using the following equation (2),



    φ=4πLf/c+4π(ε)1/2df/c  (2)

    d: a thickness of the foreign material on the object surface.

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