MICROWAVE EXCITED ULTRAVIOLET LAMP SYSTEM WITH DATA LOGGING AND RETRIEVAL CIRCUIT AND METHOD
    2.
    发明申请
    MICROWAVE EXCITED ULTRAVIOLET LAMP SYSTEM WITH DATA LOGGING AND RETRIEVAL CIRCUIT AND METHOD 审中-公开
    具有数据记录和检索电路和方法的MICROWAVE EXCUL ULTRAVIOLET LAMP系统

    公开(公告)号:US20150083940A1

    公开(公告)日:2015-03-26

    申请号:US14561397

    申请日:2014-12-05

    Abstract: A microwave excited ultraviolet lamp system with a data logging and retrieval circuit and method for operating the same. The data logging and retrieval circuit stores operational data in a cache memory using a FIFO data storage protocol. The contents of the cache memory are periodically copied to a larger removable memory so that the removable memory contains a relatively long historical record of the system operational parameters. The data logging and retrieval circuit includes a data port configured to load the contents of the cache memory into an external device when the device is coupled to the data port. A second data port allows the external device to supply power to the data logging and retrieval circuit so that data may be retrieved when the internal power supply is malfunctioning. Data stored in the removable memory may be protected so that it may only be accessed by authorized personnel.

    Abstract translation: 一种具有数据记录和检索电路的微波激发紫外灯系统及其操作方法。 数据记录和检索电路使用FIFO数据存储协议将操作数据存储在高速缓冲存储器中。 高速缓冲存储器的内容被周期地复制到更大的可移动存储器,使得可移动存储器包含系统操作参数的相对较长的历史记录。 数据记录和检索电路包括数据端口,该数据端口被配置为当设备耦合到数据端口时将高速缓冲存储器的内容加载到外部设备中。 第二个数据端口允许外部设备向数据记录和检索电路供电,以便在内部电源出现故障时可以检索数据。 存储在可移动存储器中的数据可以被保护,使得它只能被授权的人员访问。

    APPARATUS AND METHODS FOR IRRADIATING SUBSTRATES WITH ULTRAVIOLET LIGHT
    4.
    发明申请
    APPARATUS AND METHODS FOR IRRADIATING SUBSTRATES WITH ULTRAVIOLET LIGHT 审中-公开
    用紫外线照射衬底的装置和方法

    公开(公告)号:US20150123015A1

    公开(公告)日:2015-05-07

    申请号:US14531378

    申请日:2014-11-03

    CPC classification number: H01J65/044

    Abstract: An apparatus for generating ultraviolet light for irradiating a substrate. The apparatus includes a housing enclosing an interior space. The housing includes an inlet for receiving a cooling air flow, and a window configured to emit ultraviolet light and discharge the cooling air flow. A lamp bulb is mounted within the interior space between the inlet and the window. First and second microwave generators are mounted between the inlet and the lamp bulb. A plate is positioned between the inlet and the first and second microwave generators, the plate at least partially defining a plenum within the housing and including first and second openings generally aligned with the respective first and second microwave generators to direct first and second portions of the cooling air flow at the first and second microwave generators.

    Abstract translation: 一种用于产生用于照射基板的紫外光的装置。 该装置包括封闭内部空间的壳体。 壳体包括用于接收冷却空气流的入口和被配置为发射紫外线并排出冷却空气流的窗口。 灯泡安装在入口和窗户之间的内部空间内。 第一和第二微波发生器安装在入口和灯泡之间。 板被定位在入口与第一和第二微波发生器之间,板至少部分地限定壳体内的气室,并且包括通常与相应的第一和第二微波发生器对准的第一和第二开口,以引导第一和第二微波发生器的第一和第二部分 在第一和第二微波发生器处的冷却空气流。

    Microwave excited ultraviolet lamp system with data logging and retrieval circuit and method

    公开(公告)号:US11011368B2

    公开(公告)日:2021-05-18

    申请号:US14561397

    申请日:2014-12-05

    Abstract: A microwave excited ultraviolet lamp system with a data logging and retrieval circuit and method for operating the same. The data logging and retrieval circuit stores operational data in a cache memory using a FIFO data storage protocol. The contents of the cache memory are periodically copied to a larger removable memory so that the removable memory contains a relatively long historical record of the system operational parameters. The data logging and retrieval circuit includes a data port configured to load the contents of the cache memory into an external device when the device is coupled to the data port. A second data port allows the external device to supply power to the data logging and retrieval circuit so that data may be retrieved when the internal power supply is malfunctioning. Data stored in the removable memory may be protected so that it may only be accessed by authorized personnel.

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