公开(公告)号：US20200066502A1

公开(公告)日：2020-02-27

申请号：US16612697

申请日：2017-05-12

Applicant: NOVA MEASURING INSTRUMENTS, INC.

Inventor： Christopher F. BEVIS ,  Yungman Alan LIU ,  David Allen REED ,  Eli CHEIFETZ ,  Amit WEINGARTEN ,  Alexander KADYSHEVITCH

IPC: H01J49/02 ,  H01J49/06

Abstract: An ion detector for secondary ion mass spectrometer, the detector having an electron emission plate coupled to a first electrical potential and configured to emit electrons upon incidence on ions; a scintillator coupled to a second electrical potential, different from the first electrical potential, the scintillator having a front side facing the electron emission plate and a backside, the scintillator configured to emit photons from the backside upon incidence of electrons on the front side; a lightguide coupled to the backside of the scintillator and confining flow of photons emitted from the backside of the scintillator; and a solid-state photomultiplier coupled to the light guide and having an output configured to output electrical signal corresponding to incidence of photons from the lightguide. A SIMS system includes a plurality of such detectors movable arranged over the focal plane of a mass analyzer.

公开(公告)号：US20220223395A1

公开(公告)日：2022-07-14

申请号：US17531674

申请日：2021-11-19

Applicant: NOVA MEASURING INSTRUMENTS, INC.

Inventor： Christopher F. BEVIS ,  Yungman Alan LIU ,  David Allen REED ,  Eli CHEIFETZ ,  Amit WEINGARTEN ,  Alexander KADYSHEVITCH

IPC: H01J49/02 ,  H01J49/06 ,  G01T1/20 ,  G01T1/208 ,  G01T1/29 ,  G01T1/28

Abstract: An ion detector for secondary ion mass spectrometer, the detector having an electron emission plate coupled to a first electrical potential and configured to emit electrons upon incidence on ions; a scintillator coupled to a second electrical potential, different from the first electrical potential, the scintillator having a front side facing the electron emission plate and a backside, the scintillator configured to emit photons from the backside upon incidence of electrons on the front side; a lightguide coupled to the backside of the scintillator and confining flow of photons emitted from the backside of the scintillator; and a solid-state photomultiplier coupled to the light guide and having an output configured to output electrical signal corresponding to incidence of photons from the lightguide. A SIMS system includes a plurality of such detectors movable arranged over the focal plane of a mass analyzer.