公开(公告)号：US10222710B2

公开(公告)日：2019-03-05

申请号：US15121479

申请日：2015-02-26

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Matthew Sendelbach ,  Niv Sarig ,  Charles N. Archie

IPC: G03F7/20 ,  H04B17/309 ,  H01J37/28 ,  H04B17/391

Abstract: A method for use in planning metrology measurements, the method comprising: providing inverse total measurement uncertainty (TMU) analysis equations for upper and lower confidence limits TMUUL and TMULL of the TMU being independent on prior knowledge of measurements by a tool under test (TuT) and a reference measurement system (RMS), thereby enabling estimation of input parameters for said equations prior to conducting an experiment of the TMU analysis; and determining at least one of a total number N of samples to be measured in the TMU analysis and an average number ns of measurements per sample by the RMS.