公开(公告)号：US20210239753A1

公开(公告)日：2021-08-05

申请号：US17115236

申请日：2020-12-08

Applicant: NXP B.V.

Inventor： Abdellatif Zanati ,  Henrik Asendorf ,  Jan-Peter Schat ,  Nicolas Lamielle

IPC: G01R31/311 ,  H01Q1/22 ,  H01P3/12

Abstract: A test apparatus and method for testing a semiconductor device. The semiconductor device includes an integrated circuit and a plurality of external radiating elements located at a surface of the device. The external radiating elements include at least one transmit element and receive element. The test apparatus includes a plunger. The plunger includes a dielectric portion having a surface for placing against the surface of the device. The plunger also includes at least one waveguide. Each waveguide extends through the plunger for routing electromagnetic radiation transmitted by one of the transmit elements of the device to one of the receive elements of the device. Each waveguide comprises a plurality of waveguide openings for coupling electromagnetically to corresponding radiating elements of the device. The dielectric portion is configured to provide a matched interface for the electromagnetic coupling of the waveguide openings to the plurality of external radiating elements of the device.

公开(公告)号：US11635461B2

公开(公告)日：2023-04-25

申请号：US17115236

申请日：2020-12-08

Applicant: NXP B.V.

Inventor： Abdellatif Zanati ,  Henrik Asendorf ,  Jan-Peter Schat ,  Nicolas Lamielle

IPC: G01R31/311 ,  H01P3/12 ,  H01Q1/22

Abstract: A test apparatus and method for testing a semiconductor device. The semiconductor device includes an integrated circuit and a plurality of external radiating elements located at a surface of the device. The external radiating elements include at least one transmit element and receive element. The test apparatus includes a plunger. The plunger includes a dielectric portion having a surface for placing against the surface of the device. The plunger also includes at least one waveguide. Each waveguide extends through the plunger for routing electromagnetic radiation transmitted by one of the transmit elements of the device to one of the receive elements of the device. Each waveguide comprises a plurality of waveguide openings for coupling electromagnetically to corresponding radiating elements of the device. The dielectric portion is configured to provide a matched interface for the electromagnetic coupling of the waveguide openings to the plurality of external radiating elements of the device.