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公开(公告)号:US20140084417A1
公开(公告)日:2014-03-27
申请号:US14011896
申请日:2013-08-28
Applicant: NXP B.V.
Inventor: Petrus Hubertus Cornelis MAGNEE , Patrick SEBEL
IPC: H01L49/02
CPC classification number: H01L28/60 , H01L21/31 , H01L21/31111 , H01L21/31144 , H01L21/32133 , H01L21/7687 , H01L21/76879 , H01L21/76897 , H01L21/76898 , H01L23/5223 , H01L23/53223 , H01L23/53238 , H01L23/5384 , H01L23/5386 , H01L27/0629 , H01L28/40 , H01L28/75 , H01L2924/0002 , H01L2924/00
Abstract: There is disclosed a metal-insulator-metal, MIM, capacitor. The MIM capacitor comprises a MIM stack formed within an interconnect metal layer. The interconnect metal layer is utilised as an electrical connection to a metal layer of the MIM stack.
Abstract translation: 公开了一种金属绝缘体金属,MIM,电容器。 MIM电容器包括形成在互连金属层内的MIM堆叠。 互连金属层用作与MIM堆叠的金属层的电连接。