公开(公告)号：US06647090B2

公开(公告)日：2003-11-11

申请号：US10126697

申请日：2002-04-22

申请人： Naoki Kawahara ,  Kouichi Aoyagi ,  Yasujiro Yamada

发明人： Naoki Kawahara ,  Kouichi Aoyagi ,  Yasujiro Yamada

IPC分类号： G01N23223

CPC分类号： G01N23/223 ,  G01N2223/076

摘要： To provide an X-ray fluorescence spectrometer capable of providing a stable fluorescent X-ray intensity regardless of the presence of irregularities or the like on a surface of a sample to be analyzed, the X-ray fluorescence spectrometer includes an X-ray source 1 including a primary X-ray limiting diaphragm 3. An aperture 3a of the primary X-ray limiting diaphragm 3 is of a shape effective to allow change in intensity of fluorescent X-rays 7 measured by a detector 8 to be not higher than 1% in the event that a height of the sample surface 5a relative to the X-ray source 1 and the detector 8 changes 1 mm at maximum.

公开(公告)号：US06292532B1

公开(公告)日：2001-09-18

申请号：US09460972

申请日：1999-12-15

申请人： Naoki Kawahara ,  Takashi Shoji ,  Takashi Misonoo ,  Kouichi Aoyagi ,  Akira Arake ,  Takashi Sakamoto ,  Minoru Inoue ,  Yasujiro Yamada

发明人： Naoki Kawahara ,  Takashi Shoji ,  Takashi Misonoo ,  Kouichi Aoyagi ,  Akira Arake ,  Takashi Sakamoto ,  Minoru Inoue ,  Yasujiro Yamada

IPC分类号： G01N23223

CPC分类号： G01N23/223 ,  G01N2223/076

摘要： A fluorescent X-ray analyzing apparatus capable of being used as either a wavelength dispersive type or an energy dispersive type is provided, with which the analysis can be performed quickly and accurately. The fluorescent X-ray analyzing apparatus includes a detecting unit for detecting and analyzing fluorescent X-ray (5) emitted from at least one target area (1a) of a sample (1) to be analyzed as a result of excitation of such target area (1a) with a primary X-ray (3). The detecting unit includes a wavelength dispersive type detecting unit (6) including a spectroscope (8) and a first detector (9), and an energy dispersive type detecting unit (11) including a second detector (12) of an energy dispersive type. The angle &thgr;1 formed between a first path (81) of travel of the fluorescent X-ray from the target area (1a) towards the spectroscope (8) and a surface of the sample (1) is equal to the angle &thgr;2 formed between a second path (82) of travel of the fluorescent X-ray from the target area (1a) towards the second detector (12) of the energy dispersive type and a surface of the sample (1), but the second path (82) is shorter than the first path (81).

摘要翻译： 提供能够用作波长色散型或能量色散型的荧光X射线分析装置，可以快速准确地进行分析。 荧光X射线分析装置包括：检测并分析从待分析的样品（1）的至少一个目标区域（1a）发射的荧光X射线（5）的检测单元，作为该目标区域的激发 （1a）与主X射线（3）。 检测单元包括具有分光器（8）和第一检测器（9）的波长色散型检测单元（6），以及包括能量分散型的第二检测器（12）的能量分散型检测单元（11）。 在从目标区域（1a）到分光器（8）的荧光X射线的行进的第一路径（81）和样品（1）的表面之间形成的角度θ1等于形成在 来自目标区域（1a）的荧光X射线的第二路径（82）朝向能量分散型的第二检测器（12）和样品（1）的表面，但是第二路径（82）是 比第一路径（81）短。

公开(公告)号：US07450685B2

公开(公告)日：2008-11-11

申请号：US11581487

申请日：2006-10-17

申请人： Yoshiyuki Kataoka ,  Hisayuki Kohno ,  Masatsugu Kuraoka ,  Takashi Shoji ,  Yasujiro Yamada

发明人： Yoshiyuki Kataoka ,  Hisayuki Kohno ,  Masatsugu Kuraoka ,  Takashi Shoji ,  Yasujiro Yamada

IPC分类号： G01N23/223

CPC分类号： G01N23/223 ,  G01N2223/076

摘要： A scanning X-ray fluorescence spectrometer includes a quantitatively analyzing device (18) which calculates the concentration of hexavalent chrome based on the fact that the peak spectroscopic angle, at which the maximum intensity is attained in Cr—Kα line (22), changes depending on the ratio of the concentration of the hexavalent chrome vs. the concentration of the intensity of the total chrome. A plurality of detecting device (23) having different resolutions as a combination of a divergence slit (11), a spectroscopic device (6), a receiving slit (20) and a detector (8) is provided such that when the change of the peak spectroscopic angle is to be detected, a detecting device (23B) having a higher resolution than that of the detecting device (23A), which is selected when the concentration or the intensity of the total chrome is to be determined, is selected.

摘要翻译： 扫描X射线荧光光谱仪包括：计算六价铬浓度的定量分析装置（18），其基于在Cr-Kalpha线（22）中获得的最大强度的峰值分光角随着取决于 关于六价铬的浓度与总铬的强度的浓度的比率。 具有分散狭缝（11），分光装置（6），接收狭缝（20）和检测器（8）的组合的具有不同分辨率的多个检测装置（23）被设置成使得当 要检测峰值分光角度，选择当要确定总铬的浓度或强度时选择的具有比检测装置（23A）高的分辨率的检测装置（23B） 。

公开(公告)号：US20070086567A1

公开(公告)日：2007-04-19

申请号：US11581487

申请日：2006-10-17

申请人： Yoshiyuki Kataoka ,  Hisayuki Kohno ,  Masatsugu Kuraoka ,  Takashi Shoji ,  Yasujiro Yamada

发明人： Yoshiyuki Kataoka ,  Hisayuki Kohno ,  Masatsugu Kuraoka ,  Takashi Shoji ,  Yasujiro Yamada

IPC分类号： G01N23/223 ,  G01T1/36

CPC分类号： G01N23/223 ,  G01N2223/076

摘要： A scanning X-ray fluorescence spectrometer includes a quantitatively analyzing device (18) which calculates the concentration of hexavalent chrome based on the fact that the peak spectroscopic angle, at which the maximum intensity is attained in Cr-Kα line (22), changes depending on the ratio of the concentration of the hexavalent chrome vs. the concentration of the intensity of the total chrome. A plurality of detecting device (23) having different resolutions as a combination of a divergence slit (11), a spectroscopic device (6), a receiving slit (20) and a detector (8) is provided such that when the change of the peak spectroscopic angle is to be detected, a detecting device (23B) having a higher resolution than that of the detecting device (23A), which is selected when the concentration or the intensity of the total chrome is to be determined, is selected.

摘要翻译： 扫描X射线荧光光谱仪包括：计算六价铬浓度的定量分析装置（18），其基于在Cr-Kalpha线（22）中获得的最大强度的峰值分光角随着取决于 关于六价铬的浓度与总铬的强度的浓度的比率。 具有分散狭缝（11），分光装置（6），接收狭缝（20）和检测器（8）的组合的具有不同分辨率的多个检测装置（23）被设置成使得当 要检测峰值分光角度，选择当要确定总铬的浓度或强度时选择的具有比检测装置（23A）高的分辨率的检测装置（23B） 。

公开(公告)号：US08433035B2

公开(公告)日：2013-04-30

申请号：US13123121

申请日：2010-07-01

申请人： Kenji Watanabe ,  Yoshiyuki Kataoka ,  Yasujiro Yamada ,  Atsushi Morikawa

发明人： Kenji Watanabe ,  Yoshiyuki Kataoka ,  Yasujiro Yamada ,  Atsushi Morikawa

IPC分类号： G01N23/223

CPC分类号： G01N23/223 ,  G01N2223/076 ,  G01N2223/637

摘要： An X-ray fluorescence analyzing method includes irradiating a liquid sample (3A) containing hydrogen and at least one element of carbon, oxygen and nitrogen with primary X-rays (2); measuring the intensity F of fluorescent X-rays (4) from each of elements in the sample (3A) and having the atomic number 9 to 20, and the intensity S of scattered X-rays (12) from the sample (3A) caused by continuous X-rays in the primary X-rays; and calculating the concentration of each of the elements, based on the ratio between the measured intensity F, and the measured intensity S. The wavelength of the scattered X-rays (12) is so chosen as to be shorter than that of the fluorescent X-rays (4) and is so set that the measured intensity S and the mass absorption coefficient thereof are inversely proportional to each other within the range of variation of a composition of the sample (3A).

摘要翻译： X射线荧光分析方法包括将含有氢和至少一种碳，氧和氮元素的液体样品（3A）照射到初级X射线（2）上; 测量样品（3A）中每个元素的荧光X射线（4）的强度F，其原子序数为9至20，并且来自样品（3A）的散射X射线（12）的强度S引起 通过连续的X射线在主X射线; 并且基于所测量的强度F与测量的强度S之间的比率来计算每个元件的浓度。散射的X射线（12）的波长被选择为短于荧光X的波长 （4），并且被设定为使得测定强度S及其质量吸收系数在样品（3A）的组成变化范围内成反比。

公开(公告)号：US20110243301A1

公开(公告)日：2011-10-06

申请号：US13123121

申请日：2010-07-01

申请人： Kenji Watanabe ,  Yoshiyuki Kataoka ,  Yasujiro Yamada ,  Atsushi Morikawa

发明人： Kenji Watanabe ,  Yoshiyuki Kataoka ,  Yasujiro Yamada ,  Atsushi Morikawa

IPC分类号： G01N23/223 ,  G01N23/203

CPC分类号： G01N23/223 ,  G01N2223/076 ,  G01N2223/637

摘要： An X-ray fluorescence analyzing method includes irradiating a liquid sample (3A) containing hydrogen and at least one element of carbon, oxygen and nitrogen with primary X-rays (2); measuring the intensity F of fluorescent X-rays (4) from each of elements in the sample (3A) and having the atomic number 9 to 20, and the intensity S of scattered X-rays (12) from the sample (3A) caused by continuous X-rays in the primary X-rays; and calculating the concentration of each of the elements, based on the ratio between the measured intensity F, and the measured intensity S. The wavelength of the scattered X-rays (12) is so chosen as to be shorter than that of the fluorescent X-rays (4) and is so set that the measured intensity S and the mass absorption coefficient thereof are inversely proportional to each other within the range of variation of a composition of the sample (3A).

摘要翻译： X射线荧光分析方法包括将含有氢和至少一种碳，氧和氮元素的液体样品（3A）照射到初级X射线（2）上; 测量样品（3A）中每个元素的荧光X射线（4）的强度F，其原子序数为9至20，并且来自样品（3A）的散射X射线（12）的强度S导致 通过连续的X射线在主X射线; 并且基于所测量的强度F与测量的强度S之间的比率来计算每个元件的浓度。散射的X射线（12）的波长被选择为短于荧光X的波长 （4），并且被设定为使得测定强度S及其质量吸收系数在样品（3A）的组成变化范围内成反比。

公开(公告)号：US06668038B2

公开(公告)日：2003-12-23

申请号：US10006584

申请日：2001-12-10

申请人： Yoshiyuki Kataoka ,  Yasujiro Yamada

发明人： Yoshiyuki Kataoka ,  Yasujiro Yamada

IPC分类号： G01N2200

CPC分类号： G01N23/223 ,  G01J3/443 ,  G01N2223/076

摘要： Where an object to be analyzed in an X-ray fluorescence analysis is a thin film sample, the X-ray fluorescence spectrometer facilitates selection of proper secondary X-ray lines to be measured to thereby facilitate an accurate analysis. The spectrometer includes a measuring line evaluating means 23 operable to calculate for each specified secondary X-ray line to be measured, a first theoretical intensity at a specified thickness and a composition of each of layers in the thin film and a second theoretical intensity at the thickness and the composition thereof when the thickness or a concentration has been changed by a predetermined quantity, to calculate a precision of a thickness or a precision of the concentration based on the first and second theoretical intensities, and to determine applicability or inapplicability of an analysis using the specified secondary X-ray line to be measured.

摘要翻译： 在X射线荧光分析中要分析的物体是薄膜样品的情况下，X射线荧光光谱仪有助于选择要测量的适当的次级X射线，从而有助于准确分析。 光谱仪包括测量线评估装置23，其可操作以针对每个指定的待测量次级X射线线计算指定厚度的第一理论强度和薄膜中每层的组成，以及在第 当厚度或浓度已经改变预定量时，厚度及其组成，以基于第一和第二理论强度计算浓度的精度或浓度精度，并且确定分析的适用性或不适用性 使用指定的次级X射线进行测量。