公开(公告)号：US10562223B2

公开(公告)日：2020-02-18

申请号：US15769494

申请日：2016-10-17

Applicant: National Institute of Advanced Industrial Science and Technology

Inventor： Kenta Suzuki ,  SungWon Youn ,  Hiroshi Hiroshima

IPC: G03F7/00 ,  B29C59/02 ,  H01L21/027 ,  B29C59/00 ,  G03F7/20 ,  B29C43/56 ,  B29C43/02

Abstract: An imprint device according to the present invention is provided with a supply device that supplies a plurality of condensable gases, which have different saturated vapor pressures, at a fixed ratio by a first condensable gas tank (6) and a control valve (6a) and a second condensable gas tank (6) and a control valve (7a) when a concave portion formed in a mold is transferred in an atmosphere of a condensable gas, which condenses at a temperature and a pressure in the concave portion, the concave portion being sealed by a resist layer that enters into the concave portion formed in the mold (3). The imprint device makes it possible to prevent resist filling failure caused by capillary condensation and to adjust pattern line width and shape by using the same mold.