公开(公告)号：US20220299544A1

公开(公告)日：2022-09-22

申请号：US17638937

申请日：2020-08-31

申请人： National Research Council of Canada ,  The Governors of the University of Alberta

发明人： Robert A. Wolkow ,  Jason Pitters ,  Mark Salomons

IPC分类号： G01Q10/02 ,  H02N2/02 ,  G01Q10/04

摘要： A nano-positioning system for fine and coarse nano-positioning including at least one actuator, wherein the at least one actuator includes a high Curie temperature material and wherein the nano-positioning system is configured to apply a voltage to the at least one actuator to generate fine and/or coarse motion by the at least one actuator. The nano-positioning system being a stand-alone system, a scanning probe microscope, or an attachment to an existing microscope configured to perform a method of creepless nano-positioning that includes positioning a probe relative to a first area of a substrate using coarse stepping and interacting with the first area of the substrate using fine motion after less than 60 seconds of the positioning the probe. The movement of the scanning probe microscope is actuated by a high Curie temperature piezoelectric material that limits and/or eliminates creep, hysteresis and aging.