公开(公告)号：US20150075751A1

公开(公告)日：2015-03-19

申请号：US14487341

申请日：2014-09-16

Applicant: Nikon Corporation

Inventor： Michel Pharand ,  Andrew Tomko ,  Derek Coon ,  Yoichi Arai ,  Joe Rossi

IPC: F28D1/00

CPC classification number: G03F7/70875 ,  F28D2021/0019 ,  F28F9/0275 ,  G03F7/70758 ,  G03F7/70766 ,  H01L21/67109

Abstract: A reaction assembly (20) for supporting a mover (18) includes a countermass assembly (26) and a fluid distribution network (28). The fluid distribution network (28) allows for circulating a fluid (30) to provide cooling for the portion of the mover (18). The fluid distribution network (28) is positioned substantially adjacent to the countermass assembly (26), and the fluid distribution network (28) being substantially thermally decoupled from the structure of the countermass assembly (26) to inhibit thermal deformation of the countermass assembly (26).

Abstract translation: 用于支撑移动器（18）的反作用组件（20）包括反作用组件（26）和流体分配网络（28）。 流体分配网络（28）允许循环流体（30）以为移动器（18）的该部分提供冷却。 流体分配网络（28）基本上邻近反质量组件（26）定位，并且流体分配网络（28）与反质量组件（26）的结构基本上热分离，以阻止反质量组件的热变形 26）。