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    Actuator assembly including magnetic sensor system for vibrationless position feedback
    2.
    发明授权
    Actuator assembly including magnetic sensor system for vibrationless position feedback 有权

    公开(公告)号：US10451982B2

    公开(公告)日：2019-10-22

    申请号：US15922959

    申请日：2018-03-16

    Applicant: NIKON CORPORATION

    Inventor： Patrick Chang ,  Michel Pharand ,  Matthew Rosa ,  Jonathan K. Wells ,  Pedro Reynoso-Mora

    IPC: G03B27/58 ,  G03F7/20 ,  H02K11/215 ,  H01L21/68

    Abstract: An actuator assembly (16) for moving a device (22) includes a stator component (30), a mover component (32), a measurement system (18), and a signal processor (20). The measurement system (18) includes (i) a magnet assembly (244) that is coupled to and moves with the mover component (32); and (ii) a plurality of spaced apart sensors (246A). The magnet assembly (244) produces a magnetic field (244B) that moves relative to the stator component (30) as the mover component (32) moves along a mover axis (32C). Each sensor (246A) is a transducer that generates a sensor signal that varies its output voltage in response to the changing magnetic field (244B) from the magnet assembly (244) as the mover component (32) is moved relative to the sensors (246A). The signal processor (20) receives the sensor signals and estimates a position of the mover component (32) along the mover axis (32C) based at least in part on the sensor signals.

    MODULAR COIL ARRAYS FOR PLANAR AND LINEAR MOTORS
    3.
    发明申请
    MODULAR COIL ARRAYS FOR PLANAR AND LINEAR MOTORS 审中-公开
    用于平面和线性电机的模块化线圈阵列

    公开(公告)号：US20130069449A1

    公开(公告)日：2013-03-21

    申请号：US13621669

    申请日：2012-09-17

    Applicant: Nikon Corporation

    Inventor： Michel Pharand ,  Michael B. Binnard ,  Shigeru Morimoto ,  Chetan Mahadeswaraswamy ,  Rick K. Ingram ,  Christopher Edward Hatch ,  Alex Ka Tim Poon ,  Gaurav Keswani ,  Derek Coon ,  Yeong-Jun Choi

    IPC: H02K15/06 ,  H02K41/02

    CPC classification number: H02K41/031 ,  H02K3/24 ,  H02K9/19 ,  H02K9/22 ,  H02K2201/18

    Abstract: Coil arrays are disclosed for a planar or linear motor. An exemplary coil array includes multiple coil modules. Each coil module includes at least one coil set, respective electrical circuitry to and from the coil set, at least one respective hydraulic cooling device for the coil set, and respective hydraulic conduitry to and from the cooling device. The coil modules are interchangeably mountable relative to each other in the array such that mounting the coil module to the array produces accompanying hydraulic and electrical connections between the array and coil module, and removing the coil module from the array severs the connections.

    Abstract translation: 公开了用于平面或线性电动机的线圈阵列。 示例性线圈阵列包括多个线圈模块。 每个线圈组件包括至少一个线圈组，到线圈组和来自线圈组的相应电路，用于线圈组的至少一个相应的液压冷却装置，以及往返于冷却装置的相应的液压导管。 线圈模块相对于阵列中的彼此可互换地安装，使得将线圈模块安装到阵列上产生阵列和线圈模块之间的伴随的液压和电气连接，并且从阵列中去除线圈模块以切断连接。

    SYSTEM AND METHOD FOR CONTROLLING A TEMPERATURE OF A REACTION ASSEMBLY
    5.
    发明申请
    SYSTEM AND METHOD FOR CONTROLLING A TEMPERATURE OF A REACTION ASSEMBLY 有权
    用于控制反应组件温度的系统和方法

    公开(公告)号：US20150146176A1

    公开(公告)日：2015-05-28

    申请号：US14357296

    申请日：2012-11-06

    Applicant: NIKON CORPORATION

    Inventor： Michel Pharand ,  Chetan Mahadeswaraswamy ,  Michael B. Binnard

    IPC: G03F7/20

    CPC classification number: G03F7/70716 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00873 ,  G03F7/70758 ,  G03F7/70858 ,  G03F7/70875 ,  H01L21/682

    Abstract: A stage assembly (10) that includes (i) a stage (14) that retains a device (26); (ii) a reaction assembly (18) that is spaced apart from the stage (14); (iii) a stage mover (16) that moves the stage (14), the stage mover (16) including a magnet array (38) that is coupled to the stage (14) and a conductor array (36) that is coupled to the reaction assembly (18); (iv) a temperature adjuster (20); and (v) a control system (22) that selectively controls the temperature adjuster (20). The conductor array (36) includes a set of first zone conductor units (250), and a set of second zone conductor units (252). The temperature adjuster (20) independently adjusts the temperature of the set of first zone conductor units (250), and the set of second zone conductor units (252).

    Abstract translation: 一种舞台组件（10），包括（i）保持装置（26）的舞台（14）; （ii）与所述载物台（14）间隔开的反应组件（18）; （iii）移动所述载物台（14）的载物台移动器（16），所述载物台移动器（16）包括联接到所述载物台（14）的磁体阵列（38）和导体阵列（36），所述导体阵列 反应组件（18）; （iv）温度调节器（20）; 和（v）选择性地控制温度调节器（20）的控制系统（22）。 导体阵列（36）包括一组第一区导体单元（250）和一组第二区导体单元（252）。 温度调节器（20）独立地调节该组第一区导体单元（250）和该组第二区导体单元（252）的温度。

    Rotary probe head
    6.
    发明授权
    Rotary probe head 有权

    公开(公告)号：US10107654B2

    公开(公告)日：2018-10-23

    申请号：US15255108

    申请日：2016-09-01

    Applicant: Nikon Corporation

    Inventor： Patrick S. Chang ,  Matthew David Rosa ,  Johnathan A. Marquez ,  Michel Pharand

    IPC: G01B5/00 ,  G01D11/30 ,  G01B5/012 ,  G01B11/00

    Abstract: A rotary probe head having a dual interface for probe mounting that allows two separate interfaces to be mounted on opposite sides of the “A” or elevation axis of the rotary probe head. The two interfaces can be rotatable and interchangeable and allow for increased flexibility in handling different types of attachments including attachments having widely different mass, size, and/or interface connections. A probe can be mounted to one interface and a counterweight can be mounted to the opposite interface for improved holding torque performance by reducing the duty force and heat factor generation of the motor in the probe head.

    FLUID DISTRIBUTION NETWORK FOR LARGE STATOR MOTOR
    7.
    发明申请
    FLUID DISTRIBUTION NETWORK FOR LARGE STATOR MOTOR 审中-公开
    大型定子电机的流体分配网络

    公开(公告)号：US20150075751A1

    公开(公告)日：2015-03-19

    申请号：US14487341

    申请日：2014-09-16

    Applicant: Nikon Corporation

    Inventor： Michel Pharand ,  Andrew Tomko ,  Derek Coon ,  Yoichi Arai ,  Joe Rossi

    IPC: F28D1/00

    CPC classification number: G03F7/70875 ,  F28D2021/0019 ,  F28F9/0275 ,  G03F7/70758 ,  G03F7/70766 ,  H01L21/67109

    Abstract: A reaction assembly (20) for supporting a mover (18) includes a countermass assembly (26) and a fluid distribution network (28). The fluid distribution network (28) allows for circulating a fluid (30) to provide cooling for the portion of the mover (18). The fluid distribution network (28) is positioned substantially adjacent to the countermass assembly (26), and the fluid distribution network (28) being substantially thermally decoupled from the structure of the countermass assembly (26) to inhibit thermal deformation of the countermass assembly (26).

    Abstract translation: 用于支撑移动器（18）的反作用组件（20）包括反作用组件（26）和流体分配网络（28）。 流体分配网络（28）允许循环流体（30）以为移动器（18）的该部分提供冷却。 流体分配网络（28）基本上邻近反质量组件（26）定位，并且流体分配网络（28）与反质量组件（26）的结构基本上热分离，以阻止反质量组件的热变形 26）。

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