公开(公告)号：US10107654B2

公开(公告)日：2018-10-23

申请号：US15255108

申请日：2016-09-01

Applicant: Nikon Corporation

Inventor： Patrick S. Chang ,  Matthew David Rosa ,  Johnathan A. Marquez ,  Michel Pharand

IPC: G01B5/00 ,  G01D11/30 ,  G01B5/012 ,  G01B11/00

Abstract: A rotary probe head having a dual interface for probe mounting that allows two separate interfaces to be mounted on opposite sides of the “A” or elevation axis of the rotary probe head. The two interfaces can be rotatable and interchangeable and allow for increased flexibility in handling different types of attachments including attachments having widely different mass, size, and/or interface connections. A probe can be mounted to one interface and a counterweight can be mounted to the opposite interface for improved holding torque performance by reducing the duty force and heat factor generation of the motor in the probe head.