公开(公告)号：US20250130510A1

公开(公告)日：2025-04-24

申请号：US19005395

申请日：2024-12-30

Applicant: Nikon Corporation

Inventor： Pai-Hsueh Yang ,  Hiroyoshi Asaumi ,  Koichi Sakata ,  Kensuke Tokumi ,  Shigeki Kitabatake ,  Christopher Sean Margeson ,  Hwan Lee ,  Bausan Yuan

IPC: G03F7/00

Abstract: A method of controlling vibration of a structural element of an exposure apparatus includes receiving data of a position of the structural element, determining a position error signal based at least in part on the position data and a specified position of the structural element, determining a force command to damp a specified vibration mode frequency of the structural element based at least in part on the position error signal and the specified vibration mode frequency, and transmitting the force command to an actuator such that the actuator applies force to the structural element and damps vibration of the structural element at least at the specified vibration mode frequency of the structural element.