公开(公告)号：US20250130510A1

公开(公告)日：2025-04-24

申请号：US19005395

申请日：2024-12-30

Applicant: Nikon Corporation

Inventor： Pai-Hsueh Yang ,  Hiroyoshi Asaumi ,  Koichi Sakata ,  Kensuke Tokumi ,  Shigeki Kitabatake ,  Christopher Sean Margeson ,  Hwan Lee ,  Bausan Yuan

IPC: G03F7/00

Abstract: A method of controlling vibration of a structural element of an exposure apparatus includes receiving data of a position of the structural element, determining a position error signal based at least in part on the position data and a specified position of the structural element, determining a force command to damp a specified vibration mode frequency of the structural element based at least in part on the position error signal and the specified vibration mode frequency, and transmitting the force command to an actuator such that the actuator applies force to the structural element and damps vibration of the structural element at least at the specified vibration mode frequency of the structural element.

公开(公告)号：US09720335B2

公开(公告)日：2017-08-01

申请号：US14413980

申请日：2013-07-09

Applicant: NIKON CORPORATION

Inventor： Koichi Sakata ,  Hiroyoshi Asaumi

IPC: G03B27/58 ,  G03F7/20 ,  G05B19/402 ,  G05B19/19

CPC classification number: G03F7/70775 ,  G03F7/70483 ,  G03F7/70725 ,  G05B19/19 ,  G05B19/402

Abstract: A synthetic controlled variable is obtained by obtaining a synthetic quantity using measurement results of a first and a second measuring instruments and corresponding gains (or transfer function) and synthesizing the synthetic quantity and one of the measurement results of the first and the second measuring instruments, respectively, via a high pass filter and a low pass filter. A feedback control system is structured that obtains a control input using a synthetic controlled variable and a desired value, and gives a plant the control input. This makes adding of a high pass filter for removing offset of installation position of the first and the second measuring instruments no longer necessary, and allows a driving system which controls robust driving in a high bandwidth of a plate stage regardless of bandwidth in which resonance appears to be designed.

公开(公告)号：US10114296B2

公开(公告)日：2018-10-30

申请号：US15630449

申请日：2017-06-22

Applicant: NIKON CORPORATION

Inventor： Koichi Sakata ,  Hiroyoshi Asaumi

IPC: G03B27/58 ,  G03F7/20 ,  G05B19/402 ,  G05B19/19

Abstract: A synthetic controlled variable is obtained by obtaining a synthetic quantity using measurement results of a first and a second measuring instruments and corresponding gains (or transfer function) and synthesizing the synthetic quantity and one of the measurement results of the first and the second measuring instruments, respectively, via a high pass filter and a low pass filter. A feedback control system is structured that obtains a control input using a synthetic controlled variable and a desired value, and gives a plant the control input. This makes adding of a high pass filter for removing offset of installation position of the first and the second measuring instruments no longer necessary, and allows a driving system which controls robust driving in a high bandwidth of a plate stage regardless of bandwidth in which resonance appears to be designed.

公开(公告)号：US20150293463A1

公开(公告)日：2015-10-15

申请号：US14413980

申请日：2013-07-09

Applicant: NIKON CORPORATION

Inventor： Koichi Sakata ,  Hiroyoshi Asaumi

IPC: G03F7/20

CPC classification number: G03F7/70775 ,  G03F7/70483 ,  G03F7/70725 ,  G05B19/19 ,  G05B19/402

Abstract: A synthetic controlled variable (Xmix=F1(Xc)+F2(X2, X1)) is obtained by obtaining a synthetic quantity (Xc=αX2+βX2) using measurement results (X2, X1) of a first and a second measuring instruments and corresponding gains (or transfer function) (α, β) and synthesizing the synthetic quantity (Xc) and one of the measurement results (X2, X1) of the first and the second measuring instruments, respectively, via a high pass filter (F1) and a low pass filter (F2). A feedback control system is structured that obtains a control input (U) using a synthetic controlled variable (Xmix) and a desired value (R) and gives a plant the control input (U). This makes adding of a high pass filter for removing offset of installation position of the first and the second measuring instruments no longer necessary, and allows a driving system which controls robust driving in a high bandwidth of a plate stage (PST) regardless of bandwidth in which resonance appears to be designed.

Abstract translation: 通过使用第一和第二测量的测量结果（X2，X1）获得合成量（Xc =αX2+＆bgr; X2）来获得合成控制变量（Xmix = F1（Xc）+ F2（X2，X1） 仪器和相应的增益（或传递函数）（α，＆bgr），并通过高通滤波器分别合成第一和第二测量仪器的合成量（Xc）和测量结果（X2，X1）之一 （F1）和低通滤波器（F2）。 构造反馈控制系统，其使用合成控制变量（Xmix）和期望值（R）获得控制输入（U），并给出设备的控制输入（U）。 这使得添加高通滤波器以不再需要去除第一和第二测量仪器的安装位置的偏移，并且允许在板级（PST）的高带宽中控制鲁棒驱动的驱动系统，而不管带宽如何 哪个共振似乎是设计的。