公开(公告)号：US20240246148A1

公开(公告)日：2024-07-25

申请号：US18293159

申请日：2022-06-14

Applicant: Nikon SLM Solutions AG

Inventor： Jan Lukas Matyssek ,  Jan Pavlita ,  Karsten Neumann

IPC: B22F10/31 ,  B22F10/28 ,  B22F10/366 ,  B33Y50/02

CPC classification number: B22F10/31 ,  B22F10/28 ,  B22F10/366 ,  B33Y50/02 ,  B22F2999/00

Abstract: A method for calibrating a position of a laser beam in an apparatus comprising at least one optical unit for directing the laser beam is provided. The at least one optical unit comprises a plurality of optical elements. The method comprises setting a first optical configuration for the plurality of optical elements of the at least one optical unit and thereby directing the laser beam onto a measurement plane with a first focus spot size, measuring a first position within the measurement plane, of the laser beam generated with the first optical configuration, setting a second optical configuration for the plurality of optical elements of the at least one optical unit and thereby directing the laser beam onto the measurement plane with a second focus spot size different from the first focus spot size, measuring a second position within the measurement plane, of the laser beam generated with the second optical configuration, and determining at least one correction value based on the measured first position and the measured second position.

公开(公告)号：US20240246150A1

公开(公告)日：2024-07-25

申请号：US18489164

申请日：2023-10-18

Applicant: Nikon SLM Solutions AG

Inventor： Jan Lukas Matyssek

IPC: B22F10/85 ,  B22F10/28 ,  B29C64/153 ,  B29C64/282 ,  B29C64/371 ,  B29C64/393 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02

CPC classification number: B22F10/85 ,  B22F10/28 ,  B29C64/153 ,  B29C64/282 ,  B29C64/371 ,  B29C64/393 ,  B33Y50/02 ,  B33Y10/00 ,  B33Y30/00

Abstract: A method for manufacturing a workpiece comprising fusing an area (A) of a layer of a fusable material by irradiating the surface of the area (A) of the layer using a number n, n≥2 of at least two beam sources to project a corresponding number of n beam spots on n sets of locations (Li) of said surface area (A) of the layer, wherein each beam source has a predefined fuse rate (Ri) and a field of view (Fi),







❘
"\[LeftBracketingBar]"



L
i

⋂

L
j



❘
"\[RightBracketingBar]"


≤


1
100

⁢

Max
⁡
(



❘
"\[LeftBracketingBar]"


L
i


❘
"\[RightBracketingBar]"


,


❘
"\[LeftBracketingBar]"


L
j


❘
"\[RightBracketingBar]"



)



,




∀i≠j and the indices of Li, Ri and Fi symbolize the respective beam source, i.e. 0 i. Next the set of locations Li:=ISi−Si may be assigned which can then be fused using the ith-beam source.