公开(公告)号：US06881922B2

公开(公告)日：2005-04-19

申请号：US10432372

申请日：2001-11-21

申请人： Yasushi Nishida ,  Hiroaki Ito ,  Noboru Yugami

发明人： Yasushi Nishida ,  Hiroaki Ito ,  Noboru Yugami

IPC分类号： H05H1/00 ,  H01J37/32 ,  H05H1/46 ,  B23K10/00

CPC分类号： H01J37/32192 ,  H01J37/32266 ,  H01J37/32311 ,  H05H1/46

摘要： The present invention uses as a detector for adjustment measurement, monodyne interference between a microwave for plasma generation and the reflected wave. Analysis of the interference wave that is obtained using monodyne interference allows finding of the phase difference between the incident and the reflected wave and the amplitude of that reflected wave; and controlling of an excited microwave generation/control system based on them allows impedance matching between the excited microwave and the plasma. This method allows very high precision phase detection, and calculation of the characteristics of the plasma based on the detected phase shift. Therefore, it is possible to distinguish noises even in the vicinity of the matched region.

摘要翻译： 本发明用作调节测量的检测器，用于等离子体产生的微波与反射波之间的单相干涉。 使用单极干涉获得的干扰波的分析允许发现入射和反射波之间的相位差和该反射波的振幅; 并且基于它们控制激发的微波产生/控制系统允许激发的微波和等离子体之间的阻抗匹配。 该方法允许非常高精度的相位检测，并且基于检测到的相移来计算等离子体的特性。 因此，即使在匹配区域附近也可以区分噪声。

公开(公告)号：US06518706B1

公开(公告)日：2003-02-11

申请号：US09657801

申请日：2000-09-08

申请人： Noboru Yugami ,  Yasushi Nishida ,  Hiroaki Ito

发明人： Noboru Yugami ,  Yasushi Nishida ,  Hiroaki Ito

IPC分类号： H05B3126

CPC分类号： H03K5/06

摘要： A continuous or a long-pulsed microwave oscillated from a microwave oscillator 1 is propagated in a waveguided tube 2 in which a given gas is charged. Subsequently, by irradiating a laser having a given intensity from a laser source 4 to the points, A and B in the tube 2, the given gas is partially made plasma. Just then, the microwave can not travel beyond the plasma-part of the given gas and reflects thereat. Accordingly, the microwave is divided at the plasma-part and thereby, a short-pulsed microwave can be obtained.

摘要翻译： 从微波振荡器1振荡的连续的或长脉冲的微波在其中给定的气体被充电的波导管2中传播。 随后，通过从激光源4向管2中的点A和B照射具有给定强度的激光，将给定气体部分地制成等离子体。 就在这时，微波不能超过给定气体的等离子体部分，并在那里反射。 因此，微波在等离子体部分被分割，由此可以获得短脉冲的微波。