公开(公告)号：US06667467B2

公开(公告)日：2003-12-23

申请号：US09803862

申请日：2001-03-12

申请人： Nobuhiro Shimizu ,  Hiroshi Takahashi ,  Yoshiharu Shirakawabe ,  Jurgen P. Brugger ,  Walter Häberle ,  Gerd K. Binnig ,  Peter Vettiger

发明人： Nobuhiro Shimizu ,  Hiroshi Takahashi ,  Yoshiharu Shirakawabe ,  Jurgen P. Brugger ,  Walter Häberle ,  Gerd K. Binnig ,  Peter Vettiger

IPC分类号： G02B2740

CPC分类号： G01Q20/04 ,  G01Q60/38 ,  Y10S977/874

摘要： The present invention provides a microprobe capable of simplifying constitution, capable of promoting measurement accuracy of sample face and capable of dispensing with alignment adjustment at each measurement and a scanning type probe apparatus using thereof. The present invention includes a low resolution cantilever portion supported by a support portion and integrally formed with heater laminating portions, heater portions formed at the heater laminating portions, piezoresistive elements provided at bending portions and a movable portion having a low resolution stylus and a high resolution cantilever portion supported by the support portion and integrally formed with piezoresistive elements provided at the bending portions and a movable portion having a high resolution stylus.

摘要翻译： 本发明提供了一种能够简化结构的微探针，能够提高样品面的测量精度并能够在每次测量时分配对准调整和使用其的扫描型探针装置。本发明包括一个低分辨率悬臂部分， 支撑部分和加热器层压部分一体形成，形成在加热器层压部分的加热器部分，设置在弯曲部分处的压阻元件和具有低分辨率触针的可移动部分和由支撑部分支撑并且一体形成压阻的高分辨率悬臂部分 设置在弯曲部分的元件和具有高分辨率触针的可移动部分。