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公开(公告)号：US20050104605A1
公开(公告)日：2005-05-19
申请号：US10943755
申请日：2004-09-17
CPC分类号： G01L9/0075
摘要： A sensor includes a sensor main body, first and second electrodes, an electrode extraction hole, and an interconnection member. A cavity is formed in the sensor main body by joining the outer peripheral portions of the first and second substrates made of an insulating material. The first and second electrodes are formed on the inner surfaces of the first and second substrates which face each other through the cavity. The electrode extraction hole is formed through the first substrate in correspondence with the second electrode. The interconnection member guides the second electrode outside the first substrate through the cavity and the electrode extraction hole. The interconnection member is formed by thermal spraying of metal powder into the cavity from outside the sensor main body through the electrode extraction hole. An electrode extraction structure and electrode extraction method are also disclosed.
摘要翻译： 传感器包括传感器主体，第一和第二电极，电极引出孔和互连构件。 通过连接由绝缘材料制成的第一和第二基板的外周部分，在传感器主体中形成空腔。 第一和第二电极形成在通过空腔相对的第一和第二基板的内表面上。 电极引出孔与第二电极对应地形成在第一基板上。 互连部件通过空腔和电极引出孔将第二电极引导到第一基板的外部。 互连构件通过电极引出孔将金属粉末从传感器主体的外侧热喷射到空腔中而形成。 还公开了电极提取结构和电极提取方法。
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公开(公告)号：US07047815B2
公开(公告)日：2006-05-23
申请号：US10943755
申请日：2004-09-17
IPC分类号： G01L9/12
CPC分类号： G01L9/0075
摘要： A sensor includes a sensor main body, first and second electrodes, an electrode extraction hole, and an interconnection member. A cavity is formed in the sensor main body by joining the outer peripheral portions of the first and second substrates made of an insulating material. The first and second electrodes are formed on the inner surfaces of the first and second substrates which face each other through the cavity. The electrode extraction hole is formed through the first substrate in correspondence with the second electrode. The interconnection member guides the second electrode outside the first substrate through the cavity and the electrode extraction hole. The interconnection member is formed by thermal spraying of metal powder into the cavity from outside the sensor main body through the electrode extraction hole. An electrode extraction structure and electrode extraction method are also disclosed.
摘要翻译： 传感器包括传感器主体，第一和第二电极，电极引出孔和互连构件。 通过连接由绝缘材料制成的第一和第二基板的外周部分，在传感器主体中形成空腔。 第一和第二电极形成在通过空腔相对的第一和第二基板的内表面上。 电极引出孔与第二电极对应地形成在第一基板上。 互连部件通过空腔和电极引出孔将第二电极引导到第一基板的外部。 互连构件通过电极引出孔将金属粉末从传感器主体的外侧热喷射到空腔中而形成。 还公开了电极提取结构和电极提取方法。
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公开(公告)号：US08656787B2
公开(公告)日：2014-02-25
申请号：US13260169
申请日：2010-03-26
申请人： Takuya Ishihara , Nobuo Sashinami
发明人： Takuya Ishihara , Nobuo Sashinami
CPC分类号： G01L9/0075 , G01L9/0042
摘要： In an electrostatic capacitance pressure sensor provided with a pressure sensor chip of a diaphragm structure for detecting an electrostatic capacitance in accordance with a pressure of a medium to be measured, one face of a sensor diaphragm of the pressure sensor is a pressure introduction chamber side wherein the medium to be measured is introduced, and the other face is a capacitor chamber side wherein a capacitor portion is formed, where, in the sensor diaphragm, the rigidity is lower towards a center portion from a peripheral edge portion that is a boundary of diaphragm securing portions on the capacitor chamber side.
摘要翻译： 在设置有用于根据待测介质的压力检测静电电容的膜结构的压力传感器芯片的静电电容压力传感器中，压力传感器的传感器隔膜的一个面是压力引入室侧，其中 引入测量介质，另一个面是形成电容器部分的电容器室侧，其中传感器隔膜中的刚度从作为隔膜边界的周缘部分的中心部分向下朝向中心部分 固定在电容器腔侧的部分。
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公开(公告)号：US20120017691A1
公开(公告)日：2012-01-26
申请号：US13260169
申请日：2010-03-26
申请人： Takuya Ishihara , Nobuo Sashinami
发明人： Takuya Ishihara , Nobuo Sashinami
IPC分类号： G01L9/12
CPC分类号： G01L9/0075 , G01L9/0042
摘要： In an electrostatic capacitance pressure sensor provided with a pressure sensor chip of a diaphragm structure for detecting an electrostatic capacitance in accordance with a pressure of a medium to be measured, one face of a sensor diaphragm of the pressure sensor is a pressure introduction chamber side wherein the medium to be measured is introduced, and the other face is a capacitor chamber side wherein a capacitor portion is formed, where, in the sensor diaphragm, the rigidity is lower towards a center portion from a peripheral edge portion that is a boundary of diaphragm securing portions on the capacitor chamber side.
摘要翻译： 在设置有用于根据待测介质的压力检测静电电容的膜结构的压力传感器芯片的静电电容压力传感器中，压力传感器的传感器膜片的一个面是压力引入室侧，其中 引入测量介质，另一个面是形成电容器部分的电容器室侧，其中传感器隔膜中的刚度从作为隔膜边界的周缘部分的中心部分向下朝向中心部分 固定在电容器腔侧的部分。
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