公开(公告)号：US4976415A

公开(公告)日：1990-12-11

申请号：US360238

申请日：1989-06-01

申请人： Nobuyoshi Murai ,  Yoshinori Takahashi ,  Kazuyoshi Katayama

发明人： Nobuyoshi Murai ,  Yoshinori Takahashi ,  Kazuyoshi Katayama

IPC分类号： B23Q11/00 ,  F16F15/027 ,  G12B5/00 ,  H01L21/68 ,  H05K13/00

CPC分类号： H01L21/68 ,  B23Q11/0032 ,  F16F15/0275 ,  G12B5/00 ,  H05K13/0069

摘要： A damping support structure for preventing vibrations of an apparatus table supporting an apparatus for manufacturing ultra-high precision devices such as semiconductors and printed circuit boards. The apparatus table is supported by a support deck suspended to be horizontally displaceable. Linear motors are actuated in response to vibrations of the apparatus table detected by vibration sensors. The apparatus table is thus displaceable relative to a stationary section, to be safeguarded against the vibrations.

摘要翻译： 一种用于防止支撑用于制造诸如半导体和印刷电路板的超高精度器件的装置的装置台的振动的阻尼支撑结构。 装置台由悬挂以水平位移的支撑台支撑。 响应于由振动传感器检测到的装置台的振动，线性电动机被致动。 因此，装置台相对于静止部分可移动，以防止振动。

公开(公告)号：US5042784A

公开(公告)日：1991-08-27

申请号：US376982

申请日：1989-07-07

申请人： Nobuyoshi Murai ,  Yoshinori Takahashi ,  Kazuyoshi Katayama ,  Masashi Yasuda ,  Atsuhiko Mori

发明人： Nobuyoshi Murai ,  Yoshinori Takahashi ,  Kazuyoshi Katayama ,  Masashi Yasuda ,  Atsuhiko Mori

IPC分类号： F16F15/027 ,  H01L21/00 ,  H05K13/00

CPC分类号： H01L21/67011 ,  F16F15/0275 ,  H05K13/0061

摘要： A damping support structure for preventing vibrations of an apparatus table supporting an apparatus for manufacturing ultra-high precision devices such as semiconductors and printed circuit boards. The apparatus table is supported in suspension by support members, with its apparatus mounting surface disposed at a low level. The support members are supported by stationary members through vertically extendible and contractible first air springs. Horizontally extendible and contractible second air springs are disposed between the stationary members and the apparatus table. The first and second air springs serve to mitigate vertical and horizontal vibrations of the apparatus table, respectively. At the same time, in response to vibrations of the apparatus table detected by vibration sensors, air supply from air supply devices to inside spaces of the first and second air springs is controlled to apply controlling forces to the apparatus table through the first and second air springs for displacing the apparatus table relative to the stationary members and maintaining the apparatus table in an absolutely stationary state.

摘要翻译： 一种用于防止支撑用于制造诸如半导体和印刷电路板的超高精度器件的装置的装置台的振动的阻尼支撑结构。 装置台由支撑构件悬挂支撑，其装置安装表面设置在较低水平。 支撑构件通过垂直延伸和收缩的第一空气弹簧由固定构件支撑。 水平伸缩和收缩的第二空气弹簧设置在固定构件和装置台之间。 第一和第二空气弹簧分别用于减轻装置台的垂直和水平振动。 同时，响应由振动传感器检测到的装置台的振动，控制从空气供应装置到第一和第二空气弹簧的内部空间的供气，以通过第一和第二空气向装置台施加控制力 用于使装置台相对于固定构件移动并将装置台保持在绝对静止状态的弹簧。