公开(公告)号：US4763006A

公开(公告)日：1988-08-09

申请号：US925802

申请日：1986-12-03

申请人： Norbert Rau ,  Gerd Hubner ,  Wolfgang Staiger ,  Rainer Brodmann ,  Oskar Gerstorfer

发明人： Norbert Rau ,  Gerd Hubner ,  Wolfgang Staiger ,  Rainer Brodmann ,  Oskar Gerstorfer

IPC分类号： G01B11/26 ,  G01B11/30 ,  G01N21/88 ,  G01N21/89 ,  G01N21/892 ,  G01N21/952 ,  G01N21/86 ,  G01B11/24

CPC分类号： G01B11/303 ,  G01N21/88 ,  G01N21/952

摘要： A device is provided for the optical detection of form errors of a low order, for example of roughness. The device possesses a light source whose light probes the body to be examined and a light-receiving device for the light reflected by the body. The device is characterized by the fact that the light-receiving device consists of a number of light-receiving elements arranged in linear array and that an evaluation unit determines the inclination angle of the probed surface element of the body from all output signals of the light-receiving elements. Shifts in the core of the reflected light beam can be measured which are substantially below the width of a light-receiving element. The measuring results remain practically unaffected by form deviations of a higher order such as roughness etc.

摘要翻译： PCT No.PCT / DE86 / 00037 Sec。 一九八六年十二月三日 102（e）日期1986年12月3日PCT提交1986年2月5日PCT公布。 出版物WO86 / 04676 日期1986年8月14日。提供了用于光学检测低阶（例如粗糙度）的形式误差的装置。 该装置具有光探测被检体的光源和由身体反射的光的光接收装置。 该装置的特征在于，光接收装置由多个以线性阵列布置的光接收元件组成，并且评估单元根据光的所有输出信号确定被检测表面元件的倾斜角度 接收元素 可以测量反射光束的芯的位移，其大致低于光接收元件的宽度。 测量结果几乎不受高阶（如粗糙度等）的形式偏差的影响。

公开(公告)号：US4728196A

公开(公告)日：1988-03-01

申请号：US578499

申请日：1984-02-09

申请人： Oskar Gerstorfer

发明人： Oskar Gerstorfer

IPC分类号： G01B11/30

CPC分类号： G01B11/303

摘要： An arrangement for determining the surface structure and especially the roughness of a specimen which includes an image lens system that focuses a parallel ray onto the surface to be examined with an inclined incidence direction and a lens system which reproduces the reflected light beam on a detector array. The distance of the detector array is approximately equal to the focal distance of the lens system. The distance of the surface from the lens systems is also approximately equal to the focal distance of the lens systems. The arrangement according to the invention offers the advantage that also with an areal specimen illumination as well as with greater changes of the distance between the arrangement and the surface to be examined, an unequivocal coordination exists between the angle, under which the light is reflected, and the individual detector elements.

摘要翻译： 一种用于确定样品的表面结构，特别是粗糙度的装置，其包括将平行光线以倾斜入射方向聚焦在待检查表面上的图像透镜系统和在检测器阵列上再现反射光束的透镜系统 。 检测器阵列的距离近似等于透镜系统的焦距。 表面与透镜系统的距离也近似等于透镜系统的焦距。 根据本发明的装置提供的优点是，通过面试样照明以及布置和被检查表面之间的距离的更大变化，在光被反射的角度之间存在明确的协调， 和各个检测器元件。