公开(公告)号：US20160083254A1

公开(公告)日：2016-03-24

申请号：US14857423

申请日：2015-09-17

Applicant: OCI COMPANY LTD.

Inventor： Dong-Won LIM ,  Jong-Eun SHIN ,  Youn-Joong KIM ,  Hyun-Jun KIM ,  Sang-Yup LEE

IPC: C01B21/083 ,  B01D53/22

CPC classification number: C01B21/0837 ,  B01D53/22 ,  B01D53/226 ,  B01D53/227 ,  B01D2053/221 ,  B01D2256/26

Abstract: Disclosed is a method for enrichment of NF3 gas, comprising: (a) feeding a gas mixture containing a low concentration of NF3 gas and impurities; and (b) passing the feed gas mixture through a non-porous membrane module, wherein an enriched NF3 gas mixture passing through the non-porous membrane module and an unenriched NF3 gas mixture failing to pass through the non-porous membrane module are separated depending on the differences in the kinetic diameters of the individual gases.

Abstract translation: 本发明公开了一种富含NF3气体的方法，包括：（a）供给含有低浓度的NF 3气体和杂质的气体混合物; 和（b）使进料气体混合物通过无孔膜组件，其中通过无孔膜组件的富集的NF 3气体混合物和未通过无孔膜组件的未富集NF3气体混合物分离，取决于 关于各种气体的动力学直径的差异。