公开(公告)号：US20190153584A1

公开(公告)日：2019-05-23

申请号：US16091220

申请日：2017-04-07

申请人： OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON

发明人： Johann KARNER ,  Neir BEGANOVIC ,  Juergen RAMM ,  Beno WIDRIG

IPC分类号： C23C14/06 ,  C23C14/32

摘要： The present invention relates to a component comprising a surface coated with a coating comprising a MoxCryN layer, where x and y correspond to the coefficients of Mo content and Cr content in atomic percentage, respectively, when only Mp and Cr are considered, and so x+y is considered to be 100 at %.

公开(公告)号：US20220275498A1

公开(公告)日：2022-09-01

申请号：US17631842

申请日：2020-07-31

申请人： Oerlikon Surface Solutions AG, Pfäffikon

发明人： Jürgen BECKER ,  Neir BEGANOVIC ,  Johann KARNER ,  Timea STELZIG ,  Jörg VETTER

IPC分类号： C23C14/06 ,  C23C14/02 ,  C23C14/32 ,  C23C14/54

摘要： A method to produce a hard coating onto a substrate, wherein the hard coating comprises a hydrogen-free amorphous carbon coating, wherein the amorphous carbon coating is deposited onto the substrate using a cathodic arc discharge deposition technique, wherein a bias voltage is applied to the substrate with an absolute value that is greater than 0 V, preferably greater than 10 V and less than 1000 V, and wherein the absolute value of the bias voltage is increased during the coating process to obtain a first structure and a second structure and a gradient between the first and the second structure along the coating thickness, wherein the first and the second structure comprise sp2 and sp3 carbon bonds but differ in their relative concentration, wherein at least one coating pause is applied during the coating process in order to reduce the substrate temperature during the coating pause.