公开(公告)号：US20190218657A1

公开(公告)日：2019-07-18

申请号：US16230095

申请日：2018-12-21

Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION

Inventor： Yabing QI ,  Luis Katsuya ONO ,  Shenghao WANG

IPC: C23C14/24 ,  C23C14/54 ,  C23C14/06 ,  H01L51/00 ,  H01L51/44

CPC classification number: C23C14/24 ,  C23C14/06 ,  C23C14/545 ,  C23C14/548 ,  H01L51/001 ,  H01L51/0012 ,  H01L51/42 ,  H01L51/44 ,  Y02E10/549

Abstract: A system and method for fabricating perovskite films for solar cell applications are provided, the system including a housing for use as a vacuum chamber, a substrate stage coupled to the top section of the housing; a first evaporator unit coupled to the bottom section of the housing and configured to generate BX2 (metal halide material) vapor; a second evaporator unit coupled to the housing and configured to generate AX (organic material) vapor; and a flow control unit coupled to the housing for controlling circulation of the AX vapor. The dimensions of the horizontal cross-sectional shape of the first evaporator unit, the dimensions of the horizontal cross-sectional shape of the substrate stage, and the relative position in the horizontal direction between the two horizontal cross-sectional shapes are configured to maximize the overlap between the two horizontal cross-sectional shapes.

公开(公告)号：US20170229647A1

公开(公告)日：2017-08-10

申请号：US15308822

申请日：2015-04-10

Applicant: Okinawa Institute of Science and Technology School Corporation

Inventor： Yabing QI ,  Luis Katsuya ONO ,  Shenghao WANG

IPC: H01L51/00 ,  C07F7/28 ,  H01L51/44 ,  C23C14/24 ,  C23C14/54

CPC classification number: C23C14/24 ,  C23C14/06 ,  C23C14/545 ,  C23C14/548 ,  H01L51/001 ,  H01L51/0012 ,  H01L51/42 ,  H01L51/44 ,  Y02E10/549

Abstract: A system and method for fabricating perovskite films for solar cell applications are provided, the system including a housing for use as a vacuum chamber, a substrate stage coupled to the top section of the housing; a first evaporator unit coupled to the bottom section of the housing and configured to generate BX2 (metal halide material) vapor; a second evaporator unit coupled to the housing and configured to generate AX (organic material) vapor; and a flow control unit coupled to the housing for controlling circulation of the AX vapor. The dimensions of the horizontal cross-sectional shape of the first evaporator unit, the dimensions of the horizontal cross-sectional shape of the substrate stage, and the relative position in the horizontal direction between the two horizontal cross-sectional shapes are configured to maximize the overlap between the two horizontal cross-sectional shapes.