公开(公告)号：US20210018455A1

公开(公告)日：2021-01-21

申请号：US16981117

申请日：2019-03-11

Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION

Inventor： Mukhles Ibrahim Sowwan ,  Alexander James Porkovich ,  Jerome Vernieres ,  Stephan Steinhauer ,  Zakaria Ziadi

IPC: G01N27/12 ,  C01G3/02 ,  C23C28/00

Abstract: A system and method of nanoparticle deposition for achieving an acetone sensitive response based on ruthenium decorated CuO nanowires at temperatures of 200° C. and 250° C. is disclosed. This method is useful for building sensors. The method used to build the sensor is easily integrable into silicon technology broadly, and into a CMOX compatible device specifically. Additionally, it is expected that this method of nanoparticle deposition can be transferred to other MOx nanowire sensors, such as but not limited to zinc oxide nanowire.