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公开(公告)号：US20210199692A1
公开(公告)日：2021-07-01
申请号：US16812147
申请日：2020-03-06
Applicant: OKINS ELECTRONICS CO., LTD
Inventor： Jin Kook JUN , Eun Hyeong PYO , Won Ho CHOI
Abstract: There is provided a probe pin for performing an electrical inspection between a contact pad of a test apparatus and a conductive ball of a semiconductor device, the probe pin including a cylinder-type bottom plunger connected to the contact pad and configured to slide vertically, a piston-type top plunger connected to the conductive ball and configured to slide vertically, and an outer spring configured to provide an elastic force between the bottom plunger and the top plunger. According to the configuration of the present invention, it is possible to perform a stable inspection process by using the outer spring despite pin miniaturization.
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