公开(公告)号：US20140376078A1

公开(公告)日：2014-12-25

申请号：US14298707

申请日：2014-06-06

Applicant: OLYMPUS CORPORATION

Inventor： Yoshihiro SHIMADA ,  Makio UENO ,  Shingo TAMANO ,  Naoki HAYASHI ,  Eiji YOKOI

IPC: G02B21/00 ,  G02F1/11 ,  G02B21/26

CPC classification number: G02B21/0032 ,  G02B21/002 ,  G02B21/0036 ,  G02B21/0096 ,  G02B21/06 ,  G02B21/26 ,  G02B27/4261

Abstract: A scanning optical microscope includes a light source, a light converging optical system, a stage, a scanning unit which displaces an illumination light and the stage relatively, a detecting optical system, and a photodetector. A light modulation element and a relay optical system are disposed on the light converging optical system side of the light source, and a modulated signal having only amplitude changed is input to the light modulation element, and the light modulation element is positioned such that the illumination light emerged from the light modulation element with respect to the modulated signal of a predetermined amplitude coincides with an optical axis of the light converging optical system, and a position of a pupil of the light converging optical system and a position of the light modulation element are conjugate through at least the relay optical system.

Abstract translation: 扫描光学显微镜包括光源，聚光光学系统，舞台，相对地移动照明光和舞台的扫描单元，检测光学系统和光电检测器。 光调制元件和中继光学系统设置在光源的聚光光学系统侧，并且只有振幅改变的调制信号被输入到光调制元件，并且光调制元件被定位成使得照明 相对于预定幅度的调制信号从光调制元件出射的光与会聚光学系统的光轴重合，会聚光学系统的光瞳位置和光调制元件的位置是 通过至少中继光学系统共轭。