专利检索 ap:("ORCA Computing Limited") AND inv:"Taran Huffman" 第 1 页

1.

发明授权
Co-manufacturing of silicon-on-insulator waveguides and silicon nitride waveguides for hybrid photonic integrated circuits 有权

公开(公告)号：US12032205B2

公开(公告)日：2024-07-09

申请号：US18469710

申请日：2023-09-19

申请人： ORCA Computing Limited

发明人： Brian Mattis , Taran Huffman , Bryan Woo , Thien-An Nguyen

IPC分类号： G02B6/136 , G02B6/12

CPC分类号： G02B6/136 , G02B2006/12061 , G02B2006/12097 , G02B2006/12169 , G02B2006/12188 , G02B2006/12197

摘要： A method of co-manufacturing silicon waveguides, SiN waveguides, and semiconductor structures in a photonic integrated circuit. A silicon waveguide structure can be formed using a suitable process, after which it is buried in a cladding. The cladding is polished, and a silicon nitride layer is disposed to define a silicon nitride waveguide. The silicon nitride waveguide is buried in a cladding, and annealed. Thereafter, cladding above the silicon waveguide structure can be trenched through, and low-temperature operations can be performed to or with an exposed surface of the silicon waveguide structure.