Method of forming a nozzle of a fluid ejection device
    1.
    发明授权
    Method of forming a nozzle of a fluid ejection device 有权
    形成流体喷射装置的喷嘴的方法

    公开(公告)号:US09056471B2

    公开(公告)日:2015-06-16

    申请号:US14039587

    申请日:2013-09-27

    CPC classification number: B41J2/1629 B41J2/162

    Abstract: A method of forming a nozzle of a fluid ejection device, the nozzle having a straight mouth portion and a cavity portion, wherein the mouth portion is formed in a bottom surface of the substrate, and, after passivating the walls of the mouth portion, a wet etch process is applied from the bottom surface of the substrate for forming a part of the cavity portion with walls that diverge from the mouth portion, characterized in that a wet etch process is also applied from a top surface of the substrate for forming a part of the cavity portion which diverges towards the bottom surface and merges with the part that is etched from the bottom surface.

    Abstract translation: 一种形成流体喷射装置的喷嘴的方法,所述喷嘴具有直嘴部分和空腔部分,其中所述嘴部形成在所述基板的底表面中,并且在钝化所述口部的壁之后, 从衬底的底表面施加湿蚀刻工艺,以形成具有从口部分开的壁的腔部分的一部分,其特征在于,还从衬底的顶表面施加湿蚀刻工艺以形成部件 的空腔部分朝向底表面分叉并与从底表面蚀刻的部分合并。

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