公开(公告)号：US09576770B2

公开(公告)日：2017-02-21

申请号：US14888414

申请日：2014-05-14

Applicant: Okinawa Institute of Science and Technology School Corporation

Inventor： Tsumoru Shintake

IPC: G21K5/04 ,  H01J37/244 ,  H01J37/295

CPC classification number: H01J37/244 ,  G01N23/20 ,  H01J37/2955 ,  H01J2237/2449 ,  H01J2237/24578 ,  H01J2237/2544 ,  H01J2237/2803

Abstract: A low energy electron diffraction (LEED) detection module (100) includes: a first vacuum chamber for receiving diffracted electrons from a specimen (109); a larger second vacuum chamber connected to the first vacuum chamber to receive the diffracted electrons that have been transported through the first vacuum chamber; a two-dimensional electron detector disposed in the second vacuum chamber to detect the diffracted electrons; a potential shield (106) disposed generally along an inner surface of the first vacuum chamber and an inner surface of the second vacuum chamber; a magnetic lens (105) to expand a beam of the diffracted electrons that have been transported through the first vacuum chamber towards the two-dimensional electron detector; and a generally plane-shaped energy filter (103) to repel electrons having an energy lower than the probe beam (203) of electrons that impinges on the specimen (109).

Abstract translation: 低能电子衍射（LEED）检测模块（100）包括：用于从样品（109）接收衍射电子的第一真空室; 连接到第一真空室的较大的第二真空室，以接收已经传送通过第一真空室的衍射电子; 设置在第二真空室中以检测衍射电子的二维电子检测器; 大致沿第一真空室的内表面设置的电位屏蔽件（106）和第二真空室的内表面; 用于将已经通过第一真空室传送的衍射电子束朝向二维电子检测器扩大的磁性透镜（105）; 和大致平面状的能量过滤器（103），以排斥能量低于碰撞在样本（109）上的电子的探针光束（203）的能量的电子。