公开(公告)号：US20140014616A1

公开(公告)日：2014-01-16

申请号：US13549500

申请日：2012-07-15

申请人： Oleksandr Mosendz ,  Simone Pisana ,  James William Reiner ,  Franck Dreyfus Rose

发明人： Oleksandr Mosendz ,  Simone Pisana ,  James William Reiner ,  Franck Dreyfus Rose

IPC分类号： B44C1/22

CPC分类号： G11B5/84 ,  G11B5/65

摘要： A method of making a thermally-assisted recording (TAR) disk includes etching an initial layer of generally spherically shaped FePt grains encapsulated by shells of graphitic carbon layers. The etching partially or completely removes the carbon layers on the tops of the shells, exposing the FePt grains while leaving carbon segregant material between the FePt grains. Additional Fe, Pt and C are then simultaneously deposited. The additional Fe and Pt grow on the exposed FePt grains and increase the vertical height of the grains, resulting in growth of columnar FePt grains. The additional C forms on top of the grains that together with the intergranular carbon form larger carbon shells. The resulting FePt grains thus have a generally columnar shape with perpendicular magnetic anisotropy, rather than a generally spherical shape. Lateral grain isolation is maintained by the carbon segregant remaining between the grains.

摘要翻译： 制造热辅助记录（TAR）盘的方法包括蚀刻由石墨碳层包裹的通常球形FePt晶粒的初始层。 蚀刻部分或完全去除壳的顶部上的碳层，暴露FePt晶粒，同时留下碳分离材料在FePt晶粒之间。 然后同时沉积额外的Fe，Pt和C。 附加的Fe和Pt在暴露的FePt晶粒上生长并增加晶粒的垂直高度，导致柱状FePt晶粒的生长。 在颗粒顶部附加的C形成与晶粒碳一起形成更大的碳壳。 所得到的FePt晶粒因此具有垂直磁各向异性的大致圆柱形状，而不是大致球形。 侧面颗粒分离由残留在颗粒之间的碳分离体维持。

公开(公告)号：US08623670B1

公开(公告)日：2014-01-07

申请号：US13549500

申请日：2012-07-15

申请人： Oleksandr Mosendz ,  Simone Pisana ,  James William Reiner ,  Franck Dreyfus Rose

发明人： Oleksandr Mosendz ,  Simone Pisana ,  James William Reiner ,  Franck Dreyfus Rose

IPC分类号： H01L21/00 ,  H01L21/302

CPC分类号： G11B5/84 ,  G11B5/65

摘要： A method of making a thermally-assisted recording (TAR) disk includes etching an initial layer of generally spherically shaped FePt grains encapsulated by shells of graphitic carbon layers. The etching partially or completely removes the carbon layers on the tops of the shells, exposing the FePt grains while leaving carbon segregant material between the FePt grains. Additional Fe, Pt and C are then simultaneously deposited. The additional Fe and Pt grow on the exposed FePt grains and increase the vertical height of the grains, resulting in growth of columnar FePt grains. The additional C forms on top of the grains that together with the intergranular carbon form larger carbon shells. The resulting FePt grains thus have a generally columnar shape with perpendicular magnetic anisotropy, rather than a generally spherical shape. Lateral grain isolation is maintained by the carbon segregant remaining between the grains.

摘要翻译： 制造热辅助记录（TAR）盘的方法包括蚀刻由石墨碳层包裹的通常球形FePt晶粒的初始层。 蚀刻部分或完全去除壳的顶部上的碳层，暴露FePt晶粒，同时留下碳分离材料在FePt晶粒之间。 然后同时沉积额外的Fe，Pt和C。 附加的Fe和Pt在暴露的FePt晶粒上生长并增加晶粒的垂直高度，导致柱状FePt晶粒的生长。 在颗粒顶部附加的C形成与晶粒碳一起形成更大的碳壳。 所得到的FePt晶粒因此具有垂直磁各向异性的大致圆柱形状，而不是大致球形。 侧面颗粒分离由残留在颗粒之间的碳分离体维持。

公开(公告)号：US08721903B2

公开(公告)日：2014-05-13

申请号：US13439929

申请日：2012-04-05

申请人： Xiaoping Bian ,  Qing Dai ,  Oleksandr Mosendz ,  Franck Dreyfus Rose ,  Run-Han Wang

发明人： Xiaoping Bian ,  Qing Dai ,  Oleksandr Mosendz ,  Franck Dreyfus Rose ,  Run-Han Wang

IPC分类号： B44C1/22

CPC分类号： G11B5/65 ,  G11B5/72 ,  G11B5/8408

摘要： A vacuum planarization method substantially improves the surface roughness of a thermally-assisted recording (TAR) disk that has a recording layer (RL) formed of a substantially chemically-ordered FePt alloy or FePt-X alloy (or CoPt alloy or CoPt-X alloy) and a segregant, like SiO2. A first amorphous carbon overcoat (OC1) is deposited on the RL and etched with a non-chemically reactive plasma to remove at least one-half the thickness of OC1. Then a second amorphous carbon overcoat (OC2) is deposited on the etched OC1. The OC2 is then reactive-ion-etched, for example in a H2/Ar plasma, to remove at least one-half the thickness of OC2. A thin third overcoat (OC3) may be deposited on the etched OC2.

摘要翻译： 真空平面化方法大大提高了具有由基本上化学排列的FePt合金或FePt-X合金（或CoPt合金或CoPt-X合金（或CoPt-X）合金）形成的记录层（RL）的热辅助记录（TAR）盘的表面粗糙度 ）和分离剂，如SiO 2。 第一非晶碳外涂层（OC1）沉积在RL上并用非化学反应性等离子体蚀刻，以除去OC1的至少一半的厚度。 然后在蚀刻的OC1上沉积第二个无定形碳外涂层（OC2）。 然后将OC2反应离子蚀刻，例如在H 2 / Ar等离子体中，以去除OC2的至少一半的厚度。 可以在蚀刻的OC2上沉积薄的第三外涂层（OC3）。

公开(公告)号：US20130264306A1

公开(公告)日：2013-10-10

申请号：US13439929

申请日：2012-04-05

申请人： Xiaoping Bian ,  Qing Dai ,  Oleksandr Mosendz ,  Franck Dreyfus Rose ,  Run-Han Wang

发明人： Xiaoping Bian ,  Qing Dai ,  Oleksandr Mosendz ,  Franck Dreyfus Rose ,  Run-Han Wang

IPC分类号： G11B5/84

CPC分类号： G11B5/65 ,  G11B5/72 ,  G11B5/8408

摘要： A vacuum planarization method substantially improves the surface roughness of a thermally-assisted recording (TAR) disk that has a recording layer (RL) formed of a substantially chemically-ordered FePt alloy or FePt-X alloy (or CoPt alloy or CoPt-X alloy) and a segregant, like SiO2. A first amorphous carbon overcoat (OC1) is deposited on the RL and etched with a non-chemically reactive plasma to remove at least one-half the thickness of OC1. Then a second amorphous carbon overcoat (OC2) is deposited on the etched OC1. The OC2 is then reactive-ion-etched, for example in a H2/Ar plasma, to remove at least one-half the thickness of OC2. A thin third overcoat (OC3) may be deposited on the etched OC2.

摘要翻译： 真空平面化方法大大提高了具有由基本上化学排列的FePt合金或FePt-X合金（或CoPt合金或CoPt-X合金（或CoPt-X）合金）形成的记录层（RL）的热辅助记录（TAR）盘的表面粗糙度 ）和分离剂，如SiO 2。 第一非晶碳外涂层（OC1）沉积在RL上并用非化学反应性等离子体蚀刻，以除去OC1的至少一半的厚度。 然后在蚀刻的OC1上沉积第二个无定形碳外涂层（OC2）。 然后将OC2反应离子蚀刻，例如在H 2 / Ar等离子体中，以去除OC2的至少一半的厚度。 可以在蚀刻的OC2上沉积薄的第三外涂层（OC3）。

公开(公告)号：US20110244273A1

公开(公告)日：2011-10-06

申请号：US12753683

申请日：2010-04-02

申请人： Charles Mathew Mate ,  Franck Dreyfus Rose ,  Kurt Allan Rubin ,  Steven Gary Schmid ,  Tushar Keshubhai Suther

发明人： Charles Mathew Mate ,  Franck Dreyfus Rose ,  Kurt Allan Rubin ,  Steven Gary Schmid ,  Tushar Keshubhai Suther

IPC分类号： G11B5/706

CPC分类号： G11B5/82 ,  G11B5/72 ,  G11B5/855

摘要： A magnetic recording disk with pre-patterned surface features of elevated lands and recessed grooves or trenches, like a discrete-track media (DTM) or bit-patterned media (BPM) disk, has a planarized surface. A multilayered disk overcoat is used to protect the recording layer, and at least one of the overcoat layers functions as a stop layer for terminating a chemical-mechanical polishing (CMP) process that substantially planarizes the disk. All of the layers of the multilayered overcoat are located above the lands, but none of the overcoat layers, or a number of layers less than the number of layers over the lands, is located above the recesses.

摘要翻译： 具有预先图案化的表面特征的磁记录盘具有平坦化的表面，所述表面特征具有升高的平台和凹槽或沟槽，例如离散轨道介质（DTM）或位图形介质（BPM）盘。 使用多层盘外涂层来保护记录层，并且至少一个外涂层用作用于终止基本平坦化盘的化学机械抛光（CMP）工艺的停止层。 多层外涂层的所有层都位于焊盘上方，但是，在凹部上方都没有一个外涂层，或多个层数小于焊盘上的层数。

公开(公告)号：US08168311B2

公开(公告)日：2012-05-01

申请号：US12753683

申请日：2010-04-02

申请人： Charles Mathew Mate ,  Franck Dreyfus Rose ,  Kurt Allan Rubin ,  Steven Gary Schmid ,  Tushar Keshubhai Suther

发明人： Charles Mathew Mate ,  Franck Dreyfus Rose ,  Kurt Allan Rubin ,  Steven Gary Schmid ,  Tushar Keshubhai Suther

IPC分类号： G11B5/66

CPC分类号： G11B5/82 ,  G11B5/72 ,  G11B5/855

摘要： A magnetic recording disk with pre-patterned surface features of elevated lands and recessed grooves or trenches, like a discrete-track media (DTM) or bit-patterned media (BPM) disk, has a planarized surface. A multilayered disk overcoat is used to protect the recording layer, and at least one of the overcoat layers functions as a stop layer for terminating a chemical-mechanical polishing (CMP) process that substantially planarizes the disk. All of the layers of the multilayered overcoat are located above the lands, but none of the overcoat layers, or a number of layers less than the number of layers over the lands, is located above the recesses.

摘要翻译： 具有预先图案化的表面特征的磁记录盘具有平坦化的表面，所述表面特征具有升高的平台和凹槽或沟槽，例如离散轨道介质（DTM）或位图形介质（BPM）盘。 使用多层盘外涂层来保护记录层，并且至少一个外涂层用作用于终止基本平坦化盘的化学机械抛光（CMP）工艺的停止层。 多层外涂层的所有层都位于焊盘上方，但是，在凹部上方都没有一个外涂层，或多个层数小于焊盘上的层数。