Capacitive sensor and method of fabricating
    4.
    发明申请
    Capacitive sensor and method of fabricating 有权
    电容式传感器及其制造方法

    公开(公告)号:US20060191350A1

    公开(公告)日:2006-08-31

    申请号:US11353358

    申请日:2006-02-14

    IPC分类号: G01B7/16

    CPC分类号: G01L9/0075

    摘要: A capacitive sensor and a method of making it with a substrate having a diaphragm forming a first plate of a capacitor; a second fixed plate of the capacitor spaced from the diaphragm and defining a predetermined dielectric gap; a plurality of conductor elements interconnecting the substrate and fixed plate; and an edge lock supporting the fixed plate and the substrate relative to each other for maintaining the dimension of the defined gap independent of the conductor elements.

    摘要翻译: 一种电容传感器及其制造方法,该基板具有形成电容器的第一板的隔膜; 所述电容器的第二固定板与所述隔膜间隔开并限定预定的电介质间隙; 将基板和固定板互连的多个导体元件; 以及相对于彼此支撑固定板和基板的边缘锁,用于保持与导体元件无关的限定间隙的尺寸。