公开(公告)号：US20230057470A1

公开(公告)日：2023-02-23

申请号：US17820474

申请日：2022-08-17

Applicant: Onto Innovation Inc.

Inventor： John A. Tejada ,  Ju Jin ,  Jian Ding

IPC: G02B13/22 ,  G02B21/02 ,  G02F1/33 ,  G02B21/36 ,  H04N5/232 ,  G02B25/00 ,  G02B21/24

Abstract: A multichannel tunable lens system may include a review channel with a fluidic focusing device, which can adjust the focus of the channel rapidly to mitigate environmental vibrations. The review channel may generate high resolution images with reduced blur caused by vibrations or air turbulence while increasing the operating speed of the system. The review channel may include a telescope objective and eyepiece with telecentricity to generate a real image of the pupil in the fluidic focusing device. The system may also include an inspection channel to generate lower resolution images in parallel and a focus channel to determine contour information.

公开(公告)号：US20230075747A1

公开(公告)日：2023-03-09

申请号：US17930606

申请日：2022-09-08

Applicant: Onto Innovation Inc.

Inventor： John A. Tejada

IPC: G01N21/95 ,  G01N21/88 ,  G01N21/64 ,  G01J3/28

Abstract: An optical system and design can image objects under inspection in the ultraviolet (UV) and visible spectrums. This imaging can be used to detect both large defects in the visible spectrum and small defects in the UV spectrum in a single pass while reducing the time and cost of the inspection process. The optical system may include an off-axis reflective focusing system for aberration correction with a beamsplitter to separate the visible spectrum from the UV wavelengths. Cameras may then image visible and UV wavelengths.