Acousto-optic deflector with multiple output beams

    公开(公告)号:US11409184B2

    公开(公告)日:2022-08-09

    申请号:US16543691

    申请日:2019-08-19

    申请人: Orbotech Ltd.

    IPC分类号: G02F1/33 G02F1/11

    摘要: Optical apparatus includes an acousto-optic medium and an array of multiple piezoelectric transducers attached to the acousto-optic medium. A drive circuit is coupled to apply to the piezoelectric transducers respective drive signals including at least first and second frequency components at different, respective first and second frequencies and with different, respective phase offsets for the first and second frequency components at each of the multiple piezoelectric transducers.

    Acousto-optic deflector with multiple output beams

    公开(公告)号:US10451953B2

    公开(公告)日:2019-10-22

    申请号:US15524282

    申请日:2015-11-05

    申请人: Orbotech Ltd.

    IPC分类号: G02F1/33 G02F1/11

    摘要: Optical apparatus includes an acousto-optic medium and an array of multiple piezoelectric transducers attached to the acousto-optic medium. A drive circuit is coupled to apply to the piezoelectric transducers respective drive signals including at least first and second frequency components at different, respective first and second frequencies and with different, respective phase offsets for the first and second frequency components at each of the multiple piezoelectric transducers.

    Acousto-optic deflector with multiple output beams

    公开(公告)号:US10416530B2

    公开(公告)日:2019-09-17

    申请号:US15524282

    申请日:2015-11-05

    申请人: Orbotech Ltd.

    IPC分类号: G02F1/33 G02F1/11

    摘要: Optical apparatus includes an acousto-optic medium and an array of multiple piezoelectric transducers attached to the acousto-optic medium. A drive circuit is coupled to apply to the piezoelectric transducers respective drive signals including at least first and second frequency components at different, respective first and second frequencies and with different, respective phase offsets for the first and second frequency components at each of the multiple piezoelectric transducers.