公开(公告)号：US10317426B2

公开(公告)日：2019-06-11

申请号：US15370385

申请日：2016-12-06

Applicant: PANASONIC CORPORATION

Inventor： Luca Coronato ,  Giacomo Gafforelli ,  Adolfo Giambastiani ,  Federico Mazzarella ,  Massimiliano Musazzi ,  Michele Folz

IPC: G01P21/00 ,  G01P15/125

Abstract: An accelerometer has a plurality of proof masses and a plurality of sense electrodes, which collectively form at least two capacitors. A first sense drive signal is applied to a first capacitor and a second sense drive signal is applied to a second capacitor. Both of the sense drive signals have the same sense drive frequency. Capacitance signals are sensed from each of the first capacitor and second capacitor, and a common mode component of the capacitance signals is determined. A capacitor error is identified based on the common mode component.

公开(公告)号：US10379137B2

公开(公告)日：2019-08-13

申请号：US15363404

申请日：2016-11-29

Applicant: PANASONIC CORPORATION

Inventor： Giacomo Gafforelli ,  Luca Coronato ,  Adolfo Giambastiani ,  Federico Mazzarella ,  Massimiliano Musazzi ,  Michele Folz

IPC: G01P21/00 ,  G01P15/125

Abstract: A microelectromechanical (MEMS) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The auxiliary electrode is located relative to the proof mass such that a capacitance formed by the auxiliary electrode and proof mass is static in response to the linear acceleration. A sense drive signal is applied at the sense electrode and an auxiliary drive signal is applied at the auxiliary electrode. The sense drive signal and the auxiliary drive signal have difference frequencies. A portion of a sensed signal at the sense drive frequency is used to determine linear acceleration while a portion of the sensed signal at the auxiliary drive frequency is used to identify damage within a sense path from the proof mass.