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公开(公告)号:US20190119526A1
公开(公告)日:2019-04-25
申请号:US16093061
申请日:2017-09-22
Inventor: Haruka NISHIKAWA , Toshiyuki IEDA , Atsushi NAGAI , Kazuya SHIMADA
Abstract: An occurrence of a dimple during glass polishing is suppressed by scraping a fine scratch that will become the dimple to be grown in a pre-polishing, followed by main polishing. However, at a mark of the dimple in which the growth thereof is suppressed in the pre-polishing, fine roughening of a surface is generated. Further, a polishing liquid containing hydrofluoric acid, an alkali metal, water, and a surfactant that is a sulfonic acid-type or sulfate-type surfactant can suppress excess crystal growth of a deposit formed in a fine scratch in pre-polishing and suppress roughening of a surface after polishing.