公开(公告)号：US10232329B2

公开(公告)日：2019-03-19

申请号：US15411328

申请日：2017-01-20

申请人： PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.

发明人： Masanori Okano ,  Shigeki Fujiwara ,  Youhei Ishigami

IPC分类号： B05B17/00 ,  B01F11/02 ,  B01F3/04 ,  B05B17/06 ,  B08B3/10 ,  B06B1/06 ,  H01L41/09

摘要： A generating method for generating one of mist and fine-bubbles or fine-bubbles is provided. The generating method includes arranging a piezoelectric substrate equipped thereon with an excitation source in a liquid, generating a flow of the liquid using a liquid flow generator that generates the flow of the liquid relative to the piezoelectric substrate, exciting a surface acoustic wave on the excitation source, propagating the excited surface acoustic wave so as to generate mist on a gas side and to generate fine-bubbles on a liquid side of the piezoelectric substrate, carrying the generated fine-bubbles away from the piezoelectric substrate with the generated flow of the liquid, and drawing the liquid containing the fine-bubbles from a liquid container which contains the liquid.