Rational Decision-Making Tool for Semiconductor Processes

    公开(公告)号:US20220327268A9

    公开(公告)日:2022-10-13

    申请号:US17303666

    申请日:2021-06-04

    IPC分类号: G06F30/33 G06N20/00 G06Q30/02

    摘要: A robust predictive model. A plurality of different predictive models for a target feature are run, and a comparative analysis provided for each predictive model that meet minimum performance criteria for the target feature. One of the predictive models is selected, either manually or automatically, based on predefined criteria. For semi-automatic selection, a static or dynamic survey is generated for obtaining user preferences for parameters associated with the target feature. The survey results will be used to generate a model that illustrates parameter trade-offs, which will be used to finalize the optimal predictive model for the user.

    Rational Decision-Making Tool for Semiconductor Processes

    公开(公告)号:US20210294950A1

    公开(公告)日:2021-09-23

    申请号:US17303666

    申请日:2021-06-04

    IPC分类号: G06F30/33 G06N20/00 G06Q30/02

    摘要: A robust predictive model. A plurality of different predictive models for a target feature are run, and a comparative analysis provided for each predictive model that meet minimum performance criteria for the target feature. One of the predictive models is selected, either manually or automatically, based on predefined criteria. For semi-automatic selection, a static or dynamic survey is generated for obtaining user preferences for parameters associated with the target feature. The survey results will be used to generate a model that illustrates parameter trade-offs, which will be used to finalize the optimal predictive model for the user.