Scanning optical system
    1.
    发明申请
    Scanning optical system 失效
    扫描光学系统

    公开(公告)号:US20030197912A1

    公开(公告)日:2003-10-23

    申请号:US10294615

    申请日:2002-11-15

    Inventor: Yutaka Takakubo

    CPC classification number: G02B26/125 G02B26/123

    Abstract: A scanning optical system is provided with alight source that emits at least one beam, an anamorphic optical element that converges the at least one beam in an auxiliary scanning direction, a polygonal mirror, and an imaging optical system. The imaging optical system has a scanning lens, and a compensation lens. One surface of the scanning lens has an anamorphic aspherical surface whose curvature in the auxiliary scanning direction is determined independently from a cross-sectional shape thereof along the main scanning direction. Further, one surface of the compensation lens has an aspherical surface in which a tilt angle of a cross-sectional shape in the auxiliary scanning direction changes with a position in the main scanning direction, the aspherical surface being asymmetrical with respect to a plane perpendicular to the auxiliary scanning direction and including a central point thereof.

    Abstract translation: 扫描光学系统设置有发射至少一个光束的光源,使辅助扫描方向上的至少一个光束会聚的变形光学元件,多面镜和成像光学系统。 成像光学系统具有扫描透镜和补偿透镜。 扫描透镜的一个表面具有变形非球面,其辅助扫描方向上的曲率独立于主扫描方向的横截面形状来确定。 此外,补偿透镜的一个表面具有非球面,其中辅助扫描方向上的横截面形状的倾斜角随主扫描方向的位置而变化,非球面相对于垂直于主扫描方向的平面不对称 辅助扫描方向并且包括其中心点。

    Scanning optical system
    2.
    发明申请
    Scanning optical system 有权
    扫描光学系统

    公开(公告)号:US20040090658A1

    公开(公告)日:2004-05-13

    申请号:US10697163

    申请日:2003-10-31

    Inventor: Yutaka Takakubo

    Abstract: According to an aspect of the present invention, there is provided a scanning optical system, which is provided with a light source that emits a plurality of beams, a deflector that simultaneously deflects the plurality of beams incident thereon, and an imaging optical system having a scanning lens and compensation lenses. Each of the compensation lenses has a lens surface whose optical surface reference axis is tilted with respect to an optical surface reference axis of the scanning lens. At least one of lens surfaces of each of the compensation lenses is formed to be an aspherical surface defined by a two-dimensional polynomial expression.

    Abstract translation: 根据本发明的一个方面,提供了一种扫描光学系统,其设置有发射多个光束的光源,偏转器,其同时偏转入射到其上的多个光束;以及成像光学系统,具有 扫描镜头和补偿镜头。 每个补偿透镜具有相对于扫描透镜的光学表面参考轴倾斜光学表面参考轴的透镜表面。 每个补偿透镜的至少一个透镜表面形成为由二维多项式表达式限定的非球面。

    Scanning optical system
    3.
    发明申请

    公开(公告)号:US20040047018A1

    公开(公告)日:2004-03-11

    申请号:US10658457

    申请日:2003-09-10

    Inventor: Yutaka Takakubo

    CPC classification number: G02B26/123 B41J2/473

    Abstract: In a scanning optical system including a polygon mirror for dynamically deflecting N laser beams corresponding to N color components and an imaging optical system for converging the laser beams into spot beams on N photosensitive drums respectively, the imaging optical system includes: a front lens group for converging the laser beams principally in a main scanning direction while deflecting the beams to deviate from its optical surface reference axis; and N rear lens groups for converging the laser beams principally in an auxiliary scanning direction respectively. The rear surface of the front lens group and front surfaces of the rear lens groups are formed as two-dimensional polynomial aspherical surfaces. Concretely, the rear surface is formed as a step-like optical surface having N discrete areas of different heights. By the system, the laser beams are separated sufficiently to match the intervals between the photosensitive drums without the need of long optical paths, without deteriorating the scanning performance, and without the need of using mirrors which cause color misregistration and increase costs.

    Scanning optical system
    4.
    发明申请
    Scanning optical system 有权
    扫描光学系统

    公开(公告)号:US20030183747A1

    公开(公告)日:2003-10-02

    申请号:US10322524

    申请日:2002-12-19

    Inventor: Yutaka Takakubo

    CPC classification number: G02B26/123

    Abstract: A scanning optical system includes a light source that emits a plurality of beams, a polygonal mirror that deflects the plurality of beams emitted by the light source to scan within a predetermined angular range, and an imaging optical system that converges the plurality of beams on a plurality of surfaces to be scanned, respectively. The imaging optical system includes a scanning lens and a plurality of compensation lenses located between the scanning lens and a plurality of surfaces to be scanned. The plurality of beams passed through the scanning lens are incident on the plurality of compensation lenses, respectively. Each of the plurality of compensation lenses having an anamorphic surface, shapes of which in a main scanning direction are substantially the same with respect to each other.

    Abstract translation: 扫描光学系统包括发射多个光束的光源,使由光源发射的多个光束偏转到预定角度范围内进行扫描的多面镜,以及将多个光束会聚在一个 分别要扫描的多个表面。 成像光学系统包括扫描透镜和位于扫描透镜与待扫描的多个表面之间的多个补偿透镜。 通过扫描透镜的多个光束分别入射到多个补偿透镜上。 多个补偿透镜中的每一个具有变形表面,其形状在主扫描方向上彼此大致相同。

    Scanning optical system
    5.
    发明申请
    Scanning optical system 有权
    扫描光学系统

    公开(公告)号:US20040227806A1

    公开(公告)日:2004-11-18

    申请号:US10845224

    申请日:2004-05-14

    Inventor: Yutaka Takakubo

    CPC classification number: G02B26/123

    Abstract: In a scanning optical system, a plurality of laser beams pass through an imaging optical system and converge on surfaces to be scanned, respectively. The imaging optical system includes a scanning lens and a plurality of long lenses for the respective beams. The scanning lens has an anamorphic aspherical surface, and each long lens has at least one two-dimensional polynomial aspherical surface. A following relationship is optionally satisfied: null

    Abstract translation: 在扫描光学系统中,多个激光束分别通过成像光学系统并会聚在待扫描的表面上。 成像光学系统包括用于各个光束的扫描透镜和多个长透镜。 扫描透镜具有变形非球面,并且每个长透镜具有至少一个二维多项式非球面。 可选地满足以下关系:β<0.15-0.26 / N,其中,β表示入射在辅助扫描方向上的反射表面上的多个激光束中最外侧的一个的入射角(rad。)的绝对值 θ表示表示激光束相对于扫描透镜组在主扫描方向上的基准轴的最大倾斜角的半场角(弧度),N表示采用该扫描透镜组的长透镜的表面数 二维多项式非球面。

    Scanning optical system
    6.
    发明申请
    Scanning optical system 有权
    扫描光学系统

    公开(公告)号:US20040109213A1

    公开(公告)日:2004-06-10

    申请号:US10623692

    申请日:2003-07-22

    CPC classification number: G02B26/125

    Abstract: There is provided a scanning optical system, which is provided with a light source that emits at least one beam, a polygonal mirror, and an imaging optical system that converges the at least one beam deflected by the polygonal mirror to form at least one beam spot on a surface to be scanned. The at least one beam incident on the polygonal mirror is inclined in an auxiliary scanning direction which is perpendicular to the main scanning direction. Further, at least one lens surface of the imaging optical system is configured such that a beam reflected therefrom proceeds toward an outside region of the polygonal mirror.

    Abstract translation: 提供了一种扫描光学系统,其设置有发射至少一个光束的光源,多面镜和成像光学系统,其收敛由多面镜偏转的至少一个光束以形成至少一个光束点 在要扫描的表面上。 入射在多面镜上的至少一个光束在垂直于主扫描方向的辅助扫描方向上倾斜。 此外,成像光学系统的至少一个透镜表面被配置为使得从其反射的光束朝向多面镜的外部区域。

    Scanning optical system
    7.
    发明申请
    Scanning optical system 有权
    扫描光学系统

    公开(公告)号:US20030193703A1

    公开(公告)日:2003-10-16

    申请号:US10347282

    申请日:2003-01-21

    Inventor: Yutaka Takakubo

    CPC classification number: B41J2/473 G02B26/123

    Abstract: A scanning optical system is provided with a light source, a polygonal mirror, and an imaging optical system that converges the at least one beam deflected by the polygonal mirror. The imaging optical system has a scanning lens, and a compensation lens. The light source is arranged so that beams emitted by the light source are incident on the polygonal mirror from the outside of the predetermined scanning range in the main scanning direction and are incident on the polygonal mirror being inclined in an auxiliary scanning direction with respect to a plane perpendicular to a rotational axis of the polygonal mirror. Further, at least one surface of the scanning lens has a first anamorphic surface, power of the first anamorphic surface in the auxiliary scanning direction is distributed asymmetrically in the main scanning direction with respect to an optical axis of said scanning lens. Further, power of each surface of the compensation lens in the auxiliary scanning direction is distributed symmetrically with respect to a center position of said each surface.

    Abstract translation: 扫描光学系统设置有光源,多面镜和会聚由多面镜偏转的至少一个光束的成像光学系统。 成像光学系统具有扫描透镜和补偿透镜。 光源被布置成使得由光源发射的光束在主扫描方向上从预定扫描范围的外侧入射到多面镜上,并且入射在多面镜上,辅助扫描方向相对于 垂直于多面镜的旋转轴的平面。 此外,扫描透镜的至少一个表面具有第一变形面,辅助扫描方向上的第一变形面的功率相对于扫描透镜的光轴在主扫描方向上不对称地分布。 此外,辅助扫描方向上的补偿透镜的每个表面的功率相对于所述每个表面的中心位置对称地分布。

    Scanning optical system
    8.
    发明申请
    Scanning optical system 有权
    扫描光学系统

    公开(公告)号:US20040104339A1

    公开(公告)日:2004-06-03

    申请号:US10721907

    申请日:2003-11-26

    Inventor: Yutaka Takakubo

    CPC classification number: G02B26/125 G02B26/124

    Abstract: There is provided a scanning optical system which includes a light source, a line-like image forming optical system, a polygonal mirror, and an imaging optical system. The line-like image forming optical system forms a line-like image extending in the main scanning direction in the vicinity of a reflective surface of the polygonal mirror, and if the number of reflective surfaces of the polygonal mirror is less than or equal to six and if nullmnull>1.85, the following condition (1) is satisfied: r

    Abstract translation: 提供了一种扫描光学系统,其包括光源,线状图像形成光学系统,多面镜和成像光学系统。 线状图像形成光学系统在多面镜的反射面附近形成沿主扫描方向延伸的线状图像,如果多面镜的反射面的数量小于或等于6 如果| m |> 1.85,满足以下条件(1):r <5cos(w / 2f)/ [2 | m | {1-cos(w / 2f)}](1) m表示成像光学系统在辅助扫描方向上的横向倍率,f表示成像光学系统在主扫描方向上的焦距,w表示扫描宽度的一半。

    Manufacturing method of scanning optical system
    9.
    发明申请
    Manufacturing method of scanning optical system 有权
    扫描光学系统的制造方法

    公开(公告)号:US20040036974A1

    公开(公告)日:2004-02-26

    申请号:US10643900

    申请日:2003-08-20

    CPC classification number: G02B26/125

    Abstract: A laser beam emitted by a light source is incident on one of reflecting surfaces of a polygon mirror. The laser beam reflected by the reflecting surface is dynamically deflected in a main scanning direction due to the revolution of the polygon mirror and enters a scanning lens. The first surface of the scanning lens is provided with anti-reflection coating only when the following condition (1) is satisfied:H/2>null2nullD(DnullRz1)/Rz1nullnullnull(1)where nullHnull denotes the width of each reflecting surface of the polygon mirror in a auxiliary scanning direction, nullnullnull denotes the incident angle nullradiannull of the laser beam on the reflecting surface of the polygon mirror in the auxiliary scanning direction, nullDnull denotes the distance between the reflecting surface and the first surface of the scanning lens, and nullRz1null denotes the curvature radius of the first surface in an auxiliary scanning cross section.

    Abstract translation: 由光源发射的激光束入射到多面镜的反射面之一上。 由反射面反射的激光束由于多面反射镜的旋转而在主扫描方向上动态偏转并进入扫描透镜。 仅当满足以下条件(1)时,扫描透镜的第一表面仅具有抗反射涂层:H / 2> | 2betaD(D-Rz1)/ Rz1 | (1)其中,“H”表示辅助扫描方向上的多面镜的各反射面的宽度,“β”表示辅助扫描中的多面反射镜的反射面上的激光的入射角[弧度] 方向,“D”表示反射面与扫描透镜的第一面之间的距离,“Rz1”表示辅助扫描截面中第一面的曲率半径。

    Projection aligner and optical system therefor
    10.
    发明申请
    Projection aligner and optical system therefor 有权
    投影对准器及其光学系统

    公开(公告)号:US20030223127A1

    公开(公告)日:2003-12-04

    申请号:US10452236

    申请日:2003-06-03

    CPC classification number: G03F7/70225 G02B13/143 G03F7/70241

    Abstract: A projection optical system, which is telecentric with respect to an object side and an image side, projects a pattern onto an image plane, which is substantially parallel with the pattern, at a substantial equi-magnification. The projecting optical system is provided with first and second condenser lenses having a common (first) optical axis which is perpendicular to the pattern and the image plane. The projection optical system further includes an imaging lens having a second optical axis that intersects with the first optical axis at an intermediate position between the first and second condenser lenses. A first mirror reflects a beam from the pattern and passed through the first condenser lens toward the imaging lens. A second mirror reflects the beam passed through the imaging lens to the imaging lens, and a third mirror reflects the beam passed through the imaging lens toward the second condenser lens.

    Abstract translation: 相对于物体侧和图像侧是远心的投影光学系统以基本上等倍的方式将图案投影到基本上与图案平行的图像平面上。 投影光学系统设置有具有垂直于图案和图像平面的公共(第一)光轴的第一和第二聚光透镜。 投影光学系统还包括具有在第一和第二聚光透镜之间的中间位置处与第一光轴相交的第二光轴的成像透镜。 第一反射镜反射来自图案的光束并且经过第一聚光透镜朝向成像透镜。 第二反射镜将通过成像透镜的光束反射到成像透镜,并且第三反射镜将通过成像透镜的光束反射到第二聚光透镜。

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