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公开(公告)号:US20230071292A1
公开(公告)日:2023-03-09
申请号:US17903757
申请日:2022-09-06
Applicant: PIEZO STUDIO INC. , UNIVERSITY OF YAMANASHI
Inventor: Shoji KAKIO , Noritoshi KIMURA
Abstract: A surface acoustic wave device includes a piezoelectric substrate formed from a Ca3Ta(Ga1-xAlx)3Si2O14 single crystal, and an interdigital electrode formed on the surface of the piezoelectric substrate and formed from Al. The interdigital electrode is configured to generate a Love-wave-type SH wave on the surface of the piezoelectric substrate. A normalized film thickness obtained by dividing the film thickness of the interdigital electrode by the wavelength of the Love-wave-type SH wave is 0.16 or less.
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公开(公告)号:US20230117944A1
公开(公告)日:2023-04-20
申请号:US17966879
申请日:2022-10-16
Applicant: THE JAPAN STEEL WORKS, LTD. , UNIVERSITY OF YAMANASHI
Inventor: Kazuhito KISHIDA , Shoji KAKIO , Hiroaki YOKOTA , Takuya MARUKO , Kengo OGAWA
IPC: H03H9/02
Abstract: In a bonded substrate according to an embodiment, Euler angles (φ1, θ1, ψ1) of a first quartz-crystal substrate satisfy 0°≤φ1≤2°, 123°≤θ1≤128°, and 31°≤ψ1≤44°, Euler angles (φ2, θ2, ψ2) of a second quartz-crystal substrate bonded over the first quartz-crystal substrate satisfy 83°≤φ2≤95°, 82°≤θ2≤95°, and 159°≤ψ2≤161°, and a thickness of the second quartz-crystal substrate is 0.17 to 0.19 times a wavelength of a surface acoustic wave.
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公开(公告)号:US20220069799A1
公开(公告)日:2022-03-03
申请号:US17415475
申请日:2019-12-19
Inventor: Noriyuki WATANABE , Hiroshi NAKAMURA , Shoji KAKIO
Abstract: An elastic wave device that excites main vibration of an SH mode includes a piezoelectric layer formed from a piezoelectric material, a carrier substrate, and an IDT electrode formed on the piezoelectric layer. When a wavelength of an elastic wave, which is determined by an electrode cycle P of the IDT electrode, is represented by λ, the piezoelectric layer has a thickness of 0.15λ or more and 1.5λ or less. The carrier substrate has an acoustic anisotropy, and is arranged in a crystal orientation that reduces unnecessary vibrations of an SV mode and a vertical L-mode.
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