SURFACE ACOUSTIC WAVE DEVICE
    1.
    发明申请

    公开(公告)号:US20230071292A1

    公开(公告)日:2023-03-09

    申请号:US17903757

    申请日:2022-09-06

    Abstract: A surface acoustic wave device includes a piezoelectric substrate formed from a Ca3Ta(Ga1-xAlx)3Si2O14 single crystal, and an interdigital electrode formed on the surface of the piezoelectric substrate and formed from Al. The interdigital electrode is configured to generate a Love-wave-type SH wave on the surface of the piezoelectric substrate. A normalized film thickness obtained by dividing the film thickness of the interdigital electrode by the wavelength of the Love-wave-type SH wave is 0.16 or less.

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